- Article
Enhanced Electrical Properties of Copper Nitride Films Deposited via High Power Impulse Magnetron Sputtering
- Yin-Hung Chen,
- Pei-Ing Lee,
- Shikha Sakalley,
- Chao-Kuang Wen,
- Wei-Chun Cheng,
- Hui Sun and
- Sheng-Chi Chen
High Power Impulse Magnetron Sputtering (HiPIMS) has generated a great deal of interest by offering significant advantages such as high target ionization rate, high plasma density, and the smooth surface of the sputtered films. This study discusses t...