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Open AccessFeature PaperArticle

2D Dielectric Nanoimprinted PMMA Pillars on Metallo-Dielectric Films

Center for Bio-Molecular Nanotechnology, Istituto Italiano di Tecnologia (IIT), Via Barsanti, 73010 Lecce, Italy
Dipartimento di Ingegneria Elettrica e dell’Informazione, Politecnico di Bari, Via Orabona 4, 70125 Bari, Italy
Charles M. Bowden Research Center, RDECOM, Redstone Arsenal, Huntsville, AL 35898-5000, USA
Dipartimento di Ingegneria dell’Innovazione, Università del Salento, Via Arnesano, 73100 Lecce, Italy
Authors to whom correspondence should be addressed.
Appl. Sci. 2019, 9(18), 3812;
Received: 31 July 2019 / Revised: 5 September 2019 / Accepted: 7 September 2019 / Published: 11 September 2019
(This article belongs to the Special Issue Advances on Dielectric Photonic Devices and Systems Beyond Visible)
In this work, we propose an optimized nanoimprint protocol for the fabrication of a two-dimensional (2D) array of polymethyl-methacrylate (PMMA) nano-pillars deposited on different sputtered configurations (bilayer and multi-layer) of copper (Cu) and aluminum nitride (AlN) slabs supported by a silicon dioxide (SiO2) substrate. Both the Cu/AlN bilayer and multilayer thin films were deposited by a sputtering technique. The sub-micron PMMA pillars were realized by using nanoimprint lithography (NIL). In order to optimize the NIL process, several tests were performed by varying temperature and pressure, allowing us to achieve uniform and high-resolution pillars. The fabricated periodic array enabled the phase-matching of the incident plane wave exciting optical resonances. All the fabricated devices were then optically characterized by means of an ad hoc setup, where the reflected light from the sample was analyzed. The fabricated nano-pillars are mechanically stable, and they could be fully exploited for the realization of novel metallo-dielectric core/shell structures for sensing, surface-enhanced Raman spectroscopy, and light–matter interactions.
Keywords: NIL; thin films deposition; optical absorbers; diffraction grating; guided-mode resonance NIL; thin films deposition; optical absorbers; diffraction grating; guided-mode resonance
MDPI and ACS Style

Stomeo, T.; Casolino, A.; Guido, F.; Qualtieri, A.; Scalora, M.; D’Orazio, A.; Vittorio, M.D.; Grande, M. 2D Dielectric Nanoimprinted PMMA Pillars on Metallo-Dielectric Films. Appl. Sci. 2019, 9, 3812.

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