- Article
A 3D Model of the Thermoelectric Microwave Power Sensor by MEMS Technology
- Zhenxiang Yi and
- Xiaoping Liao
In this paper, a novel 3D model is proposed to describe the temperature distribution of the thermoelectric microwave power sensor. In this 3D model, the heat flux density decreases from the upper surface to the lower surface of the GaAs substrate whi...