MOEMS Based Single Chip Lorentz Force Magnetic Gradiometer†
1
Department for Integrated Sensor Systems, Danube University Krems, 2700 Wiener Neustadt, Austria
2
Institute of Sensor and Actuator Systems, TU Wien, 1040 Vienna, Austria
*
Author to whom correspondence should be addressed.
†
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 724; https://doi.org/10.3390/proceedings2130724
Published: 21 December 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
The functional principle of an optical gradient magnetic field sensor consisting of two independent laterally oscillating masses on a single chip is reported. These oscillations are caused by the Lorentz forces resulting from an alternating current through the masses interacting with a static magnetic field. Light is modulated by relative in-plane movement of the masses and a fixed frame and subsequently detected by two photodiodes. Evaluation of magnitude and phase of the output signal reveals information about the uniformity of the magnetic field. The sensor is capable of detecting uniaxially strength and direction of magnetic gradient fields, offset gradient fields and homogeneous fields.
Keywords:
gradiometer; Lorentz force; MOEMS
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited
MDPI and ACS Style
Kahr, M.; Stifter, M.; Steiner, H.; Hortschitz, W.; Kovacs, G.; Kainz, A.; Schalko, J.; Keplinger, F. MOEMS Based Single Chip Lorentz Force Magnetic Gradiometer. Proceedings 2018, 2, 724. https://doi.org/10.3390/proceedings2130724
AMA Style
Kahr M, Stifter M, Steiner H, Hortschitz W, Kovacs G, Kainz A, Schalko J, Keplinger F. MOEMS Based Single Chip Lorentz Force Magnetic Gradiometer. Proceedings. 2018; 2(13):724. https://doi.org/10.3390/proceedings2130724
Chicago/Turabian StyleKahr, Matthias; Stifter, Michael; Steiner, Harald; Hortschitz, Wilfried; Kovacs, Gabor; Kainz, Andreas; Schalko, Johannes; Keplinger, Franz. 2018. "MOEMS Based Single Chip Lorentz Force Magnetic Gradiometer" Proceedings 2, no. 13: 724. https://doi.org/10.3390/proceedings2130724
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