Nanofabrication of SOI-Based Photonic Waveguide Resonators for Gravimetric Molecule Detection †
Abstract
:1. Introduction
2. Simulations
3. Nanofabrication
4. Results and Discussion
Author Contributions
Acknowledgments
Conflicts of Interest
References
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Granz, T.; Böke, J.S.; Hamdana, G.; Martens, M.; Misra, A.; Preußler, S.; Schilling, M.; Peiner, E.; Schneider, T.; Waag, A. Nanofabrication of SOI-Based Photonic Waveguide Resonators for Gravimetric Molecule Detection. Proceedings 2018, 2, 1055. https://doi.org/10.3390/proceedings2131055
Granz T, Böke JS, Hamdana G, Martens M, Misra A, Preußler S, Schilling M, Peiner E, Schneider T, Waag A. Nanofabrication of SOI-Based Photonic Waveguide Resonators for Gravimetric Molecule Detection. Proceedings. 2018; 2(13):1055. https://doi.org/10.3390/proceedings2131055
Chicago/Turabian StyleGranz, Tony, Julia Sophie Böke, Gerry Hamdana, Michael Martens, Arijit Misra, Stefan Preußler, Meinhard Schilling, Erwin Peiner, Thomas Schneider, and Andreas Waag. 2018. "Nanofabrication of SOI-Based Photonic Waveguide Resonators for Gravimetric Molecule Detection" Proceedings 2, no. 13: 1055. https://doi.org/10.3390/proceedings2131055