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Open AccessProceedings

Nanofabrication of SOI-Based Photonic Waveguide Resonators for Gravimetric Molecule Detection

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Institut für Halbleitertechnik (IHT), Technische Universität Braunschweig, 38106 Braunschweig, Germany
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Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
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Institut für Elektrische Messtechnik und Grundlagen der Elektrotechnik (EMG), Technische Universität Braunschweig, 38106 Braunschweig, Germany
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Authors to whom correspondence should be addressed.
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 1055; https://doi.org/10.3390/proceedings2131055
Published: 13 February 2019
(This article belongs to the Proceedings of Eurosensors)
A silicon photonic microresonator comprising two curved vertical grating couplers and a single suspended Si nanowaveguide (NWG) is developed to investigate the giant enhanced Brillouin scattering in subwavelength NWGs caused by photon-phonon interaction. Finite element modelling based on COMSOL Multiphysics is conducted to optimize the critical device parameters (e.g., waveguide width, height, and length). As the smallest structures that need to be resolved are down to ~15 nm in size, electron-beam nanolithography is employed. In this case, dosage tests are carried out to minimize proximity charging effects during the nanopatterning of the silicon-on-insulator (SOI) surface, resulting in appropriate adaptive current area dosage distributions for the periodic gratings, couplers peripheral areas, and NWG, respectively. Furthermore, an enhanced inductively coupled plasma dry reactive ion etching (ICP-DRIE) process at a cryogenic temperature is used to realize smooth vertical sidewalls. Finally, buffered hydrofluoric acid (BHF)-based wet chemical etching is carried out to remove the buried oxide resulting in a suspended Si waveguide.
Keywords: nanowaveguide; silicon photonics; optical communication; integrated optics; silicon technology nanowaveguide; silicon photonics; optical communication; integrated optics; silicon technology
MDPI and ACS Style

Granz, T.; Böke, J.S.; Hamdana, G.; Martens, M.; Misra, A.; Preußler, S.; Schilling, M.; Peiner, E.; Schneider, T.; Waag, A. Nanofabrication of SOI-Based Photonic Waveguide Resonators for Gravimetric Molecule Detection. Proceedings 2018, 2, 1055.

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