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Open AccessProceedings

A Novel Bi-Stable MEMS Membrane Concept Based on a Piezoelectric Thin Film Actuator for Integrated Switching

Institute of Sensor and Actuator Systems, TU Wien, Gußhausstraße 27-29, 1040 Vienna, Austria
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Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 912; https://doi.org/10.3390/proceedings2130912
Published: 16 January 2019
(This article belongs to the Proceedings of EUROSENSORS 2018)
This study reports on a novel bi-stable actuator with an integrated aluminum nitride (AlN) piezoelectric layer sandwiched between two electrodes. To achieve bistability, the membranes must exceed a characteristic compressive stress value, also called the critical stress. For this purpose, we used highly c-axis orientated stress-controlled AlN with a thickness of 400 nm. First experiments showed, that it is possible to switch between the two stable ground states with at least two rectangular pulses at a frequency of 80 kHz and with a voltage Vpp of 40 V, resulting in a displacement of about 10 µm for each switching direction.
Keywords: piezoelectric; bi-stable; membrane; AlN piezoelectric; bi-stable; membrane; AlN
MDPI and ACS Style

Dorfmeister, M.; Kössl, B.; Schneider, M.; Schmid, U. A Novel Bi-Stable MEMS Membrane Concept Based on a Piezoelectric Thin Film Actuator for Integrated Switching. Proceedings 2018, 2, 912.

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