Next Article in Journal
Intellectual Thermoconductometric Unit Based on Aerosol Printed Ceramic MEMS Sensor for the Measurement of Natural Gas Composition
Previous Article in Journal
Thermal Flow Sensor for Non‐Invasive Measurements in HVAC Systems
Open AccessProceedings

MEMS Non-Absorbing Electromagnetic Power Sensor Employing the Effect of Radiation Pressure

1
Associate of the National Institute of Standards and Technology, Boulder, CO 80305, USA
2
Department of Physics, University of Colorado, Boulder, CO 80309, USA
3
National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305, USA
4
National Institute of Standards and Technology, 100 Bureau Dr, Gaithersburg, MD 20899, USA
*
Author to whom correspondence should be addressed.
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 767; https://doi.org/10.3390/proceedings2130767
Published: 24 December 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
We demonstrate a compact electromagnetic power sensor based on force effects of electromagnetic radiation onto a highly reflective mirror surface. Unlike the conventional power measurement approach, the photons are not absorbed and can be further used in the investigated system. In addition, the exerted force is frequency-independent, yielding a wide measurement frequency span being practically limited by the wavelength-dependent mirror reflection coefficient. The mechanical arrangement of two sensing elements in tandem suppresses the influence of gravity and vibrations on the power reading. We achieve a noise floor of about 1 W/√Hz and speed of 100 ms, being practically limited by sensor’s dynamics and lock-in amplifier filter settling time.
Keywords: radiation pressure; capacitive sensor; lock-in amplifier; silicon micromachining; acoustic noise suppression; tilt immunity; distributed bragg reflector; Archimedian spiral spring radiation pressure; capacitive sensor; lock-in amplifier; silicon micromachining; acoustic noise suppression; tilt immunity; distributed bragg reflector; Archimedian spiral spring
MDPI and ACS Style

Ryger, I.; Artusio-Glimpse, A.; Williams, P.; Shaw, G.; Simons, M.; Holloway, C.; Lehman, J. MEMS Non-Absorbing Electromagnetic Power Sensor Employing the Effect of Radiation Pressure. Proceedings 2018, 2, 767. https://doi.org/10.3390/proceedings2130767

AMA Style

Ryger I, Artusio-Glimpse A, Williams P, Shaw G, Simons M, Holloway C, Lehman J. MEMS Non-Absorbing Electromagnetic Power Sensor Employing the Effect of Radiation Pressure. Proceedings. 2018; 2(13):767. https://doi.org/10.3390/proceedings2130767

Chicago/Turabian Style

Ryger, Ivan; Artusio-Glimpse, Alexandra; Williams, Paul; Shaw, Gordon; Simons, Matthew; Holloway, Christopher; Lehman, John. 2018. "MEMS Non-Absorbing Electromagnetic Power Sensor Employing the Effect of Radiation Pressure" Proceedings 2, no. 13: 767. https://doi.org/10.3390/proceedings2130767

Find Other Styles
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop