- Article
An influence of polyHEMA gate layer on properties of ChemFETs
- Marek Dawgul,
- Dorota G. Pijanowska,
- Alfred Krzyskow,
- Jerzy Kruk and
- Wladyslaw Torbicz
A complex deposition procedure of the hydrogel layer of modified poly(2-hydroxyethyl methacrylate) (polyHEMA) covalently linked to the silicon nitride surface and covering only the gate area of the ISFET, was optimized for photolithographic technolog...