- Article
Investigation of Antireflection Nb2O5 Thin Films by the Sputtering Method under Different Deposition Parameters
- Kun-Neng Chen,
- Chao-Ming Hsu,
- Jing Liu,
- Yu-Chen Liou and
- Cheng-Fu Yang
In this study, Nb2O5 ceramic was used as the target to deposit the Nb2O5 thin films on glass substrates with the radio frequency (RF) magnetron sputtering method. Different deposition temperatures and O2 ratios were used as parameters to investigate...