An All-Solid-State Electrochromic Device Based on WO3–Nb2O5 Composite Films Prepared by Fast-Alternating Bipolar-Pulsed Reactive Magnetron Sputtering
Abstract
:1. Introduction
2. Experimental Procedures
2.1. Film Deposition Process
2.2. Film Characterizations
3. Results and Discussion
3.1. Electrochromic Films
3.2. All-Solid-State Electrochromic Devices
4. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Samples | P (mtorr) | fAr (sccm) | fO₂ (sccm) | Psp (W) | Vdischarge (V) | d (nm) | |
---|---|---|---|---|---|---|---|
WO3 | 10 | 50 | PID | (DC) | 250 | 550 | 411 |
W-Nb-150w | 10 | 50 | PID | (Bipolar) | W 250 | W 636 | 442 |
Nb 150 | Nb 522 | ||||||
W-Nb-250w | 10 | 50 | PID | (Bipolar) | W 250 | W 620 | 462 |
Nb 250 | Nb 565 | ||||||
W-Nb-350w | 10 | 50 | PID | (Bipolar) | W 250 | W 625 | 467 |
Nb 350 | Nb 588 | ||||||
W-Nb-450w | 10 | 50 | PID | (Bipolar) | W 250 | W 610 | 443 |
Nb 450 | Nb 625 | ||||||
Nb2O5 | 10 | 50 | PID | (DC) | 500 | 580 | 186 |
ITO | 3 | 40 | 1 | (DC) | 300 | 355 | 230 |
Thin Film | P (mtorr) | fAr (sccm) | fO₂ (sccm) | Psp (W) | Vdischarge (V) | d (nm) | |
---|---|---|---|---|---|---|---|
ITO | 3 | 40 | 1 | (DC) | 300 | 355 | 230 |
W-Nb-350w | 10 | 50 | PID | (Bipolar) | W 250 | W 625 | 350 |
Nb 350 | Nb 588 | ||||||
Nb2O5 | 10 | 50 | PID | (DC) | 500 | 580 | 230 |
NiVOx | 10 | 125 | 6 | (DC) | 500 | 400 | 200 |
ITO | 3 | 40 | 1 | (DC) | 300 | 355 | 230 |
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Tang, C.-J.; He, J.-L.; Jaing, C.-C.; Liang, C.-J.; Chou, C.-H.; Han, C.-Y.; Tien, C.-L. An All-Solid-State Electrochromic Device Based on WO3–Nb2O5 Composite Films Prepared by Fast-Alternating Bipolar-Pulsed Reactive Magnetron Sputtering. Coatings 2019, 9, 9. https://doi.org/10.3390/coatings9010009
Tang C-J, He J-L, Jaing C-C, Liang C-J, Chou C-H, Han C-Y, Tien C-L. An All-Solid-State Electrochromic Device Based on WO3–Nb2O5 Composite Films Prepared by Fast-Alternating Bipolar-Pulsed Reactive Magnetron Sputtering. Coatings. 2019; 9(1):9. https://doi.org/10.3390/coatings9010009
Chicago/Turabian StyleTang, Chien-Jen, Ju-Liang He, Cheng-Chung Jaing, Chen-Jui Liang, Ching-Hung Chou, Chien-Yuan Han, and Chuen-Lin Tien. 2019. "An All-Solid-State Electrochromic Device Based on WO3–Nb2O5 Composite Films Prepared by Fast-Alternating Bipolar-Pulsed Reactive Magnetron Sputtering" Coatings 9, no. 1: 9. https://doi.org/10.3390/coatings9010009