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14,580 Results Found

  • Article
  • Open Access
13 Citations
4,633 Views
11 Pages

14 January 2022

We report the growth of non-polar GaN and AlGaN films on Si(111) substrates by plasma-assisted metal-organic chemical vapor deposition (PA-MOCVD). Low-temperature growth of GaN or AlN was used as a buffer layer to overcome the lattice mismatch and th...

  • Article
  • Open Access
8 Citations
2,887 Views
10 Pages

The Role of GaN in the Heterostructure WS2/GaN for SERS Applications

  • Tsung-Shine Ko,
  • En-Ting Lin,
  • Yen-Teng Ho and
  • Chen-An Deng

12 April 2023

In the application of WS2 as a surface–enhanced Raman scattering (SERS) substrate, enhancing the charge transfer (CT) opportunity between WS2 and analyte is an important issue for SERS efficiency. In this study, we deposited few-layer WS2 (2&nd...

  • Article
  • Open Access
16 Citations
3,510 Views
9 Pages

3 August 2022

This paper reviews the near-equilibrium ammonothermal (NEAT) growth of bulk gallium nitride (GaN) crystals and reports the evaluation of 2″ GaN substrates and 100 mmbulk GaN crystal grown in our pilot production reactor. Recent progress in oxyg...

  • Article
  • Open Access
7 Citations
4,327 Views
10 Pages

High Current Density Trench CAVET on Bulk GaN Substrates with Low-Temperature GaN Suppressing Mg Diffusion

  • Xinyi Wen,
  • Kwang Jae Lee,
  • Yusuke Nakazato,
  • Jaeyi Chun and
  • Srabanti Chowdhury

21 April 2023

We report that, for the first time, a low-temperature GaN (LT-GaN) layer prepared by metal–organic chemical vapor deposition (MOCVD) regrowth was used as a Mg stopping layer (MSL) for a GaN trench current–aperture vertical electron transi...

  • Communication
  • Open Access
8 Citations
2,453 Views
9 Pages

Effect of GaN Cap Thickness on the DC Performance of AlGaN/GaN HEMTs

  • Zuorong Nie,
  • Kai Wang,
  • Xiaoyi Liu and
  • Hong Wang

26 April 2024

We prepared AlGaN/GaN high electron mobility transistors (HEMTs) with GaN cap thicknesses of 0, 1, 3, and 5 nm and compared the material characteristics and device performances. It was found that the surface morphology of the epitaxial layer was effe...

  • Article
  • Open Access
12 Citations
4,050 Views
8 Pages

The Surface Morphology Evolution of GaN Nucleation Layer during Annealing and Its Influence on the Crystal Quality of GaN Films

  • Lin Shang,
  • Bingshe Xu,
  • Shufang Ma,
  • Qingming Liu,
  • Huican Ouyang,
  • Hengsheng Shan,
  • Xiaodong Hao and
  • Bin Han

5 February 2021

The surface morphology evolution of GaN nucleation layer (NL) after different annealing time has been investigated by atomic force microscope. The surface morphologies of GaN NL after different annealing time are island-like. It is observed that for...

  • Review
  • Open Access
40 Citations
6,081 Views
12 Pages

GaN Laser Diode Technology for Visible-Light Communications

  • Stephen P. Najda,
  • Piotr Perlin,
  • Tadek Suski,
  • Lucja Marona,
  • Mike Leszczyński,
  • Przemek Wisniewski,
  • Szymon Stanczyk,
  • Dario Schiavon,
  • Thomas Slight and
  • Scott Watson
  • + 3 authors

Gallium nitride (GaN) laser diodes (LDs) are considered for visible light communications (VLC) in free space, underwater, and in plastic optical fibers (POFs). A review of recent results is presented, showing high-frequency operation of AlGaInN laser...

  • Article
  • Open Access
3 Citations
3,418 Views
11 Pages

Demonstration of HCl-Based Selective Wet Etching for N-Polar GaN with 42:1 Selectivity to Al0.24Ga0.76N

  • Emmanuel Kayede,
  • Emre Akso,
  • Brian Romanczyk,
  • Nirupam Hatui,
  • Islam Sayed,
  • Kamruzzaman Khan,
  • Henry Collins,
  • Stacia Keller and
  • Umesh K. Mishra

22 May 2024

A wet-etching technique based on a mixture of hydrochloric (HCl) and nitric (HNO3) acids is introduced, demonstrating exceptional 42:1 selectivity for etching N-polar GaN over Al0.24Ga0.76N. In the absence of an AlGaN etch stop layer, the etchant pri...

  • Article
  • Open Access
1,032 Views
15 Pages

Self-Calibrating TSEP for Junction Temperature and RUL Prediction in GaN HEMTs

  • Yifan Cui,
  • Yutian Gan,
  • Kangyao Wen,
  • Yang Jiang,
  • Chunzhang Chen,
  • Qing Wang and
  • Hongyu Yu

16 July 2025

Gallium nitride high-electron-mobility transistors (GaN HEMTs) are critical for high-power applications like AI power supplies and robotics but face reliability challenges due to increased dynamic ON-resistance (RDS_ON) from electrical and thermomech...

  • Review
  • Open Access
2 Citations
3,125 Views
30 Pages

Recent Advancements in N-polar GaN HEMT Technology

  • Emre Akso,
  • Kamruzzaman Khan,
  • Henry Collins,
  • Boyu Wang,
  • Robert Hamwey,
  • Tanmay Chavan,
  • Christopher Clymore,
  • Weiyi Li,
  • Oguz Odabasi and
  • Umesh Mishra
  • + 4 authors

22 September 2025

N-polar GaN HEMT technology has emerged as a disruptive technology that outperforms Ga-polar GaN HEMTs in terms of high-frequency power amplification capability. In this paper, the authors present a comprehensive review of the evolution of N-polar Ga...

  • Article
  • Open Access
2 Citations
3,528 Views
9 Pages

Passivation of Surface States in GaN by NiO Particles

  • Martin Velazquez-Rizo,
  • Pavel Kirilenko,
  • Daisuke Iida,
  • Zhe Zhuang and
  • Kazuhiro Ohkawa

30 January 2022

GaN and NiO/GaN electrodes were characterized by impedance spectroscopy measurements in 0.1 M NaOH. We observed the suppression of the surface states capacitance due to the modification of the chemical state of superficial Ga atoms by NiO. This resul...

  • Review
  • Open Access
32 Citations
15,973 Views
21 Pages

Vertical GaN MOSFET Power Devices

  • Catherine Langpoklakpam,
  • An-Chen Liu,
  • Yi-Kai Hsiao,
  • Chun-Hsiung Lin and
  • Hao-Chung Kuo

16 October 2023

Gallium nitride (GaN) possesses remarkable characteristics such as a wide bandgap, high critical electric field, robust antiradiation properties, and a high saturation velocity for high-power devices. These attributes position GaN as a pivotal materi...

  • Article
  • Open Access
918 Views
21 Pages

GaN HEMT Oscillators with Buffers

  • Sheng-Lyang Jang,
  • Ching-Yen Huang,
  • Tzu Chin Yang and
  • Chien-Tang Lu

28 July 2025

With their superior switching speed, GaN high-electron-mobility transistors (HEMTs) enable high power density, reduce energy losses, and increase power efficiency in a wide range of applications, such as power electronics, due to their high breakdown...

  • Article
  • Open Access
9 Citations
5,038 Views
23 Pages

A New GaN-Based Device, P-Cascode GaN HEMT, and Its Synchronous Buck Converter Circuit Realization

  • Chih-Chiang Wu,
  • Ching-Yao Liu,
  • Guo-Bin Wang,
  • Yueh-Tsung Shieh,
  • Wei-Hua Chieng and
  • Edward Yi Chang

11 June 2021

This paper attempts to disclose a new GaN-based device, called the P-Cascode GaN HEMT, which uses only a single gate driver to control both the D-mode GaN and PMOS transistors. The merit of this synchronous buck converter is that it can reduce the ci...

  • Review
  • Open Access
3 Citations
4,516 Views
29 Pages

Plasma Treatment Technologies for GaN Electronics

  • Botong Li,
  • Imteaz Rahaman,
  • Hunter D. Ellis,
  • Houqiang Fu,
  • Yuji Zhao,
  • Yong Cai,
  • Baoshun Zhang and
  • Kai Fu

6 November 2024

Nowadays, the third-generation semiconductor led by GaN has brought great changes to the semiconductor industry. Utilizing its characteristics of a wide bandgap, high breakdown Electric field, and high electron mobility, GaN material is widely applie...

  • Article
  • Open Access
2 Citations
3,516 Views
13 Pages

Comparative Study of ZnO Nanostructures Grown on Variously Orientated GaN and AlxGa1−xN: The Role of Polarization, and Surface Pits

  • Zhiyuan Gao,
  • Liwei Lu,
  • Xiaowei Xue,
  • Jiangjiang Li,
  • Lihuan Zhao,
  • Dilshad Ahmad and
  • Hongda Li

9 December 2019

Through comparing ZnO directly grown on the substrates of a-plane, c-plane, and (11-22) plane GaN and AlxGa1−xN (0.06 ≤ x ≤ 1), the roles of different factors that may influence growth have been studied. Seeded by surface pits, ZnO nanowi...

  • Article
  • Open Access
2 Citations
2,567 Views
14 Pages

31 January 2025

N-polar GaN HEMTs feature a natural back-barrier and enable the formation of low-resistance Ohmic contacts, with the potential to suppress short-channel effects and current collapse effects at sub-100 nm gate lengths, rendering them particularly prom...

  • Article
  • Open Access
5 Citations
1,991 Views
10 Pages

The Electrical and Thermal Characteristics of Stacked GaN MISHEMT

  • Caixin Hui,
  • Qiuqi Chen,
  • Yijun Shi,
  • Zhiyuan He,
  • Yun Huang,
  • Xiangjun Lu,
  • Hongyue Wang,
  • Jie Jiang and
  • Guoguang Lu

28 November 2022

To study the working performance of 3D stacked chips, a double-layer stacked GaN MISHEMTs structure was designed to study the electro-thermal characteristics and heat transfer process of stacked chips. Firstly, the electrical characteristics of doubl...

  • Review
  • Open Access
95 Citations
12,054 Views
22 Pages

13 July 2020

In the last two decades, GaN nanostructures of various forms like nanowires (NWs), nanotubes (NTs), nanofibers (NFs), nanoparticles (NPs) and nanonetworks (NNs) have been reported for gas sensing applications. In this paper, we have reviewed our grou...

  • Article
  • Open Access
32 Citations
4,866 Views
10 Pages

Compliant Micron-Sized Patterned InGaN Pseudo-Substrates Utilizing Porous GaN

  • Shubhra S. Pasayat,
  • Chirag Gupta,
  • Yifan Wang,
  • Steven P. DenBaars,
  • Shuji Nakamura,
  • Stacia Keller and
  • Umesh K. Mishra

4 January 2020

The compliant behavior of densely packed 10 × 10 µm2 square patterned InGaN layers on top of porous GaN is demonstrated. The elastic relaxation of the InGaN layers is enabled by the low stiffness of the porous GaN under layer. High resolu...

  • Article
  • Open Access
1 Citations
2,055 Views
10 Pages

1 September 2022

An extensive study has been conducted on a series of AlGaN/GaN high electron mobility transistor (HEMT) samples using metalorganic vapour phase epitaxy, to investigate the influence of growth modes for GaN buffer layers on device performance. The uni...

  • Article
  • Open Access
1 Citations
1,050 Views
8 Pages

Study of GaN Thick Films Grown on Different Nitridated Ga2O3 Films

  • Xin Jiang,
  • Yuewen Li,
  • Zili Xie,
  • Tao Tao,
  • Peng Chen,
  • Bin Liu,
  • Xiangqian Xiu,
  • Rong Zhang and
  • Youdou Zheng

9 August 2025

In this paper, various Ga2O3 films, including amorphous Ga2O3 films, β-Ga2O3, and α-Ga2O3 epitaxial films, have been nitridated and converted to single-crystalline GaN layers on the surface. Although the original Ga2O3 films are different,...

  • Article
  • Open Access
1 Citations
2,840 Views
11 Pages

Two-Dimensional Electron Gas in Thin N-Polar GaN Channels on AlN on Sapphire Templates

  • Markus Pristovsek,
  • Itsuki Furuhashi,
  • Xu Yang,
  • Chengzhi Zhang and
  • Matthew D. Smith

20 September 2024

We report on 2-dimensional electron gases realized in binary N-polar GaN channels on AlN on sapphire templates grown by metal–organic vapor phase epitaxy. The measured sheet carrier density of 3.8×1013 cm−2 is very close to the theo...

  • Article
  • Open Access
1 Citations
1,341 Views
14 Pages

Dependence of GaN Exciton Energy on Temperature

  • Xiancheng Liu,
  • Peng Chen,
  • Zili Xie,
  • Xiangqian Xiu,
  • Dunjun Chen,
  • Hong Zhao,
  • Yi Shi,
  • Rong Zhang and
  • Youdou Zheng

26 January 2025

In this paper, we investigate the relationship between GaN exciton energy and temperature by using high-quality, strain-free GaN epilayers. Traditional models, such as Varshni’s model and the Bose–Einstein model, are primarily based on em...

  • Review
  • Open Access
24 Citations
7,114 Views
32 Pages

Circuit Models of Power MOSFETs Leading the Way of GaN HEMT Modelling—A Review

  • Enrico Bottaro,
  • Santi Agatino Rizzo and
  • Nunzio Salerno

7 May 2022

Gallium nitride high-electron-mobility transistor (GaN HEMT) is a key enabling technology for obtaining high-efficient and compact power electronic systems. At the design stage of a power converter, the proper modelling of the GaN HEMT is essential t...

  • Article
  • Open Access
3 Citations
9,490 Views
9 Pages

GaN Micromechanical Resonators with Meshed Metal Bottom Electrode

  • Azadeh Ansari,
  • Che-Yu Liu,
  • Chien-Chung Lin,
  • Hao-Chung Kuo,
  • Pei-Cheng Ku and
  • Mina Rais-Zadeh

17 March 2015

This work describes a novel architecture to realize high-performance gallium nitride (GaN) bulk acoustic wave (BAW) resonators. The method is based on the growth of a thick GaN layer on a metal electrode grid. The fabrication process starts with the...

  • Article
  • Open Access
6 Citations
3,996 Views
11 Pages

Characterization of the Dynamic RON of 600 V GaN Switches under Operating Conditions

  • Alessio Alemanno,
  • Alberto Santarelli,
  • Enrico Sangiorgi and
  • Corrado Florian

13 February 2023

High-voltage GaN switches can offer tremendous advantages over silicon counterparts for the development of high-efficiency switching-mode power converters at high commutation frequency. Nonetheless, GaN devices are prone to charge-trapping effects th...

  • Article
  • Open Access
1 Citations
2,412 Views
21 Pages

Thermal Stability of Thin Metal Films on GaN Surfaces: Morphology and Nanostructuring

  • Andrzej Stafiniak,
  • Wojciech Macherzyński,
  • Adam Szyszka,
  • Radosław Szymon,
  • Mateusz Wośko and
  • Regina Paszkiewicz

27 November 2025

The development of metal nanostructures on large-area Gallium Nitride (GaN) surfaces has the potential to enable new, low-cost technologies for III-N semiconductor layer nanostructuring. Self-assembled nanostructures are typically formed through the...

  • Article
  • Open Access
2 Citations
2,198 Views
10 Pages

Negative Magnetoresistivity in Highly Doped n-Type GaN

  • Leszek Konczewicz,
  • Malgorzata Iwinska,
  • Elzbieta Litwin-Staszewska,
  • Marcin Zajac,
  • Henryk Turski,
  • Michal Bockowski,
  • Dario Schiavon,
  • Mikołaj Chlipała,
  • Sandrine Juillaguet and
  • Sylvie Contreras

11 October 2022

This paper presents low-temperature measurements of magnetoresistivity in heavily doped n-type GaN grown by basic GaN growth technologies: molecular beam epitaxy, metal-organic vapor phase epitaxy, halide vapor phase epitaxy and ammonothermal. Additi...

  • Article
  • Open Access
22 Citations
4,652 Views
8 Pages

Vertical-Type Ni/GaN UV Photodetectors Fabricated on Free-Standing GaN Substrates

  • Bing Ren,
  • Meiyong Liao,
  • Masatomo Sumiya,
  • Jian Huang,
  • Linjun Wang,
  • Yasuo Koide and
  • Liwen Sang

19 July 2019

The authors report on a vertical-type visible-blind ultraviolet (UV) Schottky-type photodetector fabricated on a homoepitaxial GaN layer grown on free-standing GaN substrates with a semi-transparent Ni Schottky contact. Owing to the high-quality GaN...

  • Article
  • Open Access
8 Citations
2,300 Views
8 Pages

Scattering Analysis of AlGaN/AlN/GaN Heterostructures with Fe-Doped GaN Buffer

  • Dmitri S. Arteev,
  • Alexei V. Sakharov,
  • Wsevolod V. Lundin,
  • Evgenii E. Zavarin,
  • Andrey E. Nikolaev,
  • Andrey F. Tsatsulnikov and
  • Viktor M. Ustinov

14 December 2022

The results of the study of the influence of Fe segregation into the unintentionally doped GaN channel layer in AlGaN/AlN/GaN heterostructures with Fe-doped GaN buffer layer on the electrical properties of two-dimensional electron gas are presented....

  • Article
  • Open Access
1 Citations
1,220 Views
13 Pages

Crystallographic Engineering of CrN Buffer Layers for GaN Thin Film Epitaxy

  • Kyu-Yeon Shim,
  • Seongho Kang,
  • Min-Joo Ahn,
  • Yukyeong Cha,
  • Eojin-Gyere Ham,
  • Dohoon Kim and
  • Dongjin Byun

16 April 2025

Gallium nitride (GaN) is commonly used in various semiconductor systems owing to its high mobility and thermal stability; however, the production of GaN thin films using the currently employed methods requires improvement. To facilitate the growth of...

  • Article
  • Open Access
13 Citations
4,840 Views
7 Pages

Enhanced P-Type GaN Conductivity by Mg Delta Doped AlGaN/GaN Superlattice Structure

  • Ying Zhao,
  • Shengrui Xu,
  • Hongchang Tao,
  • Yachao Zhang,
  • Chunfu Zhang,
  • Lansheng Feng,
  • Ruoshi Peng,
  • Xiaomeng Fan,
  • Jinjuan Du and
  • Yue Hao
  • + 1 author

31 December 2020

A method of combining the AlGaN/GaN superlattices and Mg delta doping was proposed to achieve a high conductivity p-type GaN layer. The experimental results provided the evidence that the novel doping technique achieves superior p-conductivity. The H...

  • Article
  • Open Access
4 Citations
2,149 Views
13 Pages

Electrothermal Failure Physics of GaN Schottky Diodes Under High-Temperature Forward Biasing

  • Nahid Sultan Al-Mamun,
  • Yuxin Du,
  • Jianan Song,
  • Rongming Chu and
  • Aman Haque

20 February 2025

The reliability of GaN-based devices operating under high temperatures is crucial for their application in extreme environments. To identify the fundamental mechanisms behind high-temperature degradation, we investigated GaN-on-sapphire Schottky barr...

  • Article
  • Open Access
8 Citations
4,715 Views
10 Pages

4 June 2018

Gallium nitride (GaN) is one of important functional materials for optoelectronics and electronics. GaN exists both in equilibrium wurtzite and metastable zinc-blende structural phases. The zinc-blende GaN has superior electronic and optical properti...

  • Review
  • Open Access
20 Citations
8,630 Views
17 Pages

Research Progress and Development Prospects of Enhanced GaN HEMTs

  • Lili Han,
  • Xiansheng Tang,
  • Zhaowei Wang,
  • Weihua Gong,
  • Ruizhan Zhai,
  • Zhongqing Jia and
  • Wei Zhang

4 June 2023

With the development of energy efficiency technologies such as 5G communication and electric vehicles, Si-based GaN microelectronics has entered a stage of rapid industrialization. As a new generation of microwave and millimeter wave devices, High El...

  • Review
  • Open Access
15 Citations
7,001 Views
25 Pages

Research Progress in Capping Diamond Growth on GaN HEMT: A Review

  • Yingnan Wang,
  • Xiufei Hu,
  • Lei Ge,
  • Zonghao Liu,
  • Mingsheng Xu,
  • Yan Peng,
  • Bin Li,
  • Yiqiu Yang,
  • Shuqiang Li and
  • Xiaobo Hu
  • + 3 authors

14 March 2023

With the increased power density of gallium nitride (GaN) high electron mobility transistors (HEMTs), effective cooling is required to eliminate the self-heating effect. Incorporating diamond into GaN HEMT is an alternative way to dissipate the heat...

  • Proceeding Paper
  • Open Access
9 Citations
3,683 Views
27 Pages

In this paper, the surface properties of bare and film-covered gallium nitride (GaN) of the wurtzite form, (0001) oriented are summarized. Thin films of several elements—manganese, nickel, arsenic and antimony—are formed by the physical vapour deposi...

  • Feature Paper
  • Review
  • Open Access
2 Citations
4,499 Views
76 Pages

10 September 2025

Gallium Nitride (GaN) is a wide-bandgap semiconductor that has revolutionized optoelectronic applications, enabling blue/white light-emitting devices and high-power electronics. Point defects in GaN strongly influence its optical and electronic prope...

  • Article
  • Open Access
4 Citations
2,415 Views
9 Pages

The Effect of Channel Layer Thickness on the Performance of GaN HEMTs for RF Applications

  • Qian Yu,
  • Sheng Wu,
  • Meng Zhang,
  • Ling Yang,
  • Xu Zou,
  • Hao Lu,
  • Chunzhou Shi,
  • Wenze Gao,
  • Mei Wu and
  • Yue Hao
  • + 4 authors

24 December 2024

In this paper, AlGaN/GaN high electron mobility transistors (HEMTs) with different thicknesses of unintentional doping GaN (UID-GaN) channels were compared and discussed. In order to discuss the effect of different thicknesses of the UID-GaN layer on...

  • Article
  • Open Access
2 Citations
3,343 Views
11 Pages

Resonant Raman Scattering in Boron-Implanted GaN

  • Yi Peng,
  • Wenwang Wei,
  • Muhammad Farooq Saleem,
  • Kai Xiao,
  • Yanlian Yang,
  • Yufei Yang,
  • Yukun Wang and
  • Wenhong Sun

31 January 2022

A small Boron ion (B-ion) dose of 5 × 1014 cm−2 was implanted in a GaN epilayer at an energy of 50 keV, and the sample was subjected to high-temperature rapid thermal annealing (RTA). The resonant Raman spectrum (RRS) showed a strong char...

  • Article
  • Open Access
15 Citations
4,847 Views
9 Pages

We investigate the electrical characteristics of Schottky contacts for an Au/hydride vapor phase epitaxy (HVPE) a-plane GaN template grown via in situ GaN nanodot formation. Although the Schottky diodes present excellent rectifying characteristics, t...

  • Article
  • Open Access
29 Citations
7,778 Views
14 Pages

A Study on the Growth Window of Polycrystalline Diamond on Si3N4-coated N-Polar GaN

  • Mohamadali Malakoutian,
  • Matthew A. Laurent and
  • Srabanti Chowdhury

25 September 2019

Diamond has the most desirable thermal properties for applications in electronics. In principle, diamond is the best candidate for integration with other materials for thermal management due to its high thermal conductivity. Therefore, if low thermal...

  • Article
  • Open Access
5 Citations
3,194 Views
10 Pages

N-polar GaN Film Epitaxy on Sapphire Substrate without Intentional Nitridation

  • Zhaole Su,
  • Yangfeng Li,
  • Xiaotao Hu,
  • Yimeng Song,
  • Rui Kong,
  • Zhen Deng,
  • Ziguang Ma,
  • Chunhua Du,
  • Wenxin Wang and
  • Yang Jiang
  • + 2 authors

21 April 2022

High-temperature nitridation is commonly thought of as a necessary process to obtain N-polar GaN films on a sapphire substrate. In this work, high-quality N-polar GaN films were grown on a vicinal sapphire substrate with a 100 nm high-temperature (HT...

  • Review
  • Open Access
2 Citations
4,908 Views
39 Pages

A Comprehensive Study on GaN Power Devices: Reliability, Performance, and Application Perspectives

  • Susmita Mistri,
  • Catherine Langpoklakpam,
  • Surya Elangovan and
  • Hao-Chung Kuo

13 November 2025

This review examines recent advances in Gallium Nitride (GaN) power semiconductor devices and their growing impact on the development of high-efficiency power conversion systems. It explores innovations in device design, packaging methods, and gate-d...

  • Article
  • Open Access
27 Citations
8,038 Views
9 Pages

21 July 2017

The UV-to-visible rejection ratio is one of the important figure of merits of GaN-based UV photodetectors. For cost-effectiveness and large-scale fabrication of GaN devices, we tried to grow a GaN epitaxial layer on silicon substrate with complicated...

  • Article
  • Open Access
3 Citations
3,419 Views
15 Pages

An Experimental Study of Dislocation Dynamics in GaN

  • Eugene B. Yakimov,
  • Yury O. Kulanchikov and
  • Pavel S. Vergeles

2 June 2023

The dynamics of dislocations introduced through indentation or scratching at room temperature into a few GaN layers that were grown using the HVPE, MOCVD and ELOG methods and had different dislocation densities were studied via the electron-beam-indu...

  • Article
  • Open Access
3 Citations
2,861 Views
14 Pages

Comparative Study on Schottky Contact Behaviors between Ga- and N-Polar GaN with SiNx Interlayer

  • Zhehan Yu,
  • Yijun Dai,
  • Ke Tang,
  • Tian Luo,
  • Shengli Qi,
  • Smriti Singh,
  • Lu Huang,
  • Jichun Ye,
  • Biplab Sarkar and
  • Wei Guo

We conducted a comparative study on the characterization of Ga-polar and N-polar GaN metal–insulator–semiconductor (MIS) Schottky contact with a SiNx gate dielectric. The correlation between the surface morphology and the current–vo...

  • Article
  • Open Access
4 Citations
2,252 Views
9 Pages

1 October 2023

In this study, carbon-doped semi-insulating N-polar GaN on a sapphire substrate was prepared using a propane precursor. Controlling the deposition rate of N-polar GaN helped to improve the carbon incorporation efficiency, providing a semi-insulating...

  • Article
  • Open Access
2 Citations
3,238 Views
9 Pages

Epitaxial Growth of GaN on Magnetron Sputtered AlN/Hexagonal BN/Sapphire Substrates

  • Jinxing Wu,
  • Peixian Li,
  • Shengrui Xu,
  • Xiaowei Zhou,
  • Hongchang Tao,
  • Wenkai Yue,
  • Yanli Wang,
  • Jiangtao Wu,
  • Yachao Zhang and
  • Yue Hao

13 November 2020

Magnetron sputtering is adopted to deposit ~25 nm thick AlN on the surface of hexagonal BN(h-BN)/sapphire substrates, followed by epitaxial GaN growth on top of the AlN/h-BN/sapphire substrate using a metal–organic chemical vapor deposition sys...

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