Beyond printing text on paper, inkjet printing methods have recently been applied to print passive electrical and optical microparts, such as conductors, resistors, solder bumps and polymeric micro lenses. They are also useful to print micro-electro-...
Recently, additive manufacturing (AM) processes applied to the micrometer range are subjected to intense development motivated by the influence of the consolidated methods for the macroscale and by the attraction for digital design and freeform fabri...
The correct identification of smartphones has various applications in the field of security or the fight against counterfeiting. As the level of sophistication in counterfeit electronics increases, detection procedures must become more accurate but a...
This paper presents a novel fabrication method for amorphous alloy wire giant magneto-impedance (GMI) magnetic sensor based on micro electro mechanical systems (MEMS) technology. In this process, negative SU-8 thick photoresist was proposed as the so...
This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of th...
Micro-electro-mechanical system (MEMS) mirrors are widely used for optical modulation, attenuation, steering, switching and tracking. In most cases, MEMS mirrors are packaged in air, resulting in overshoot and ringing upon actuation. In this paper, a...
With increasing demands for wireless sensing nodes for assets control and condition monitoring; needs for alternatives to expensive conventional accelerometers in vibration measurements have been arisen. Micro-Electro Mechanical Systems (MEMS) accele...
The delaying mechanism is an important part of micro-electro-mechanical systems (MEMS) devices. However, very few mechanical delaying mechanisms are available. In this paper, an elastic-beam delaying mechanism has been proposed innovatively through e...
The objective of this review is to investigate the potential of functionalized magnetic polymer composites for use in electromagnetic micro-electro-mechanical systems (MEMS) for biomedical applications. The properties that make magnetic polymer compo...
With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed...
Vacuum gauges based on Micro-Electro-Mechanical System (MEMS) technology have the advantages of small size, high reliability, and low cost, so they are widely used in semiconductor, chemical, laboratory, and aerospace. In this paper, a high-reliabili...
Micro Electro-Mechanical Systems (MEMS) are currently being considered in the space sector due to its suitable level of performance for spacecrafts in terms of mechanical robustness with low power consumption, small mass and size, and significant adv...
This paper introduces an optical 2-axis Micro Electro-Mechanical System (MEMS) micromirror actuated by a pair of electrothermal actuators and a set of passive torsion bars. The actuated element is a dual-reflective circular mirror plate of 1 m m...
Current CMOS-micro-electro-mechanical systems (MEMS) fabrication technologies permit cardiological implantable devices with sensing capabilities, such as the iStents, to be developed in such a way that MEMS sensors can be monolithically integrated to...
Fast steering mirrors (FSMs) designed by the micro-electro-mechanical system (MEMS) technology are significantly smaller in volume and mass, offering distinct advantages. To improve their performance in the open-loop control mode, this study introduc...
The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (M...
This contribution presents an overview of advances in scanning micromirrors based on MEMS (Micro-electro-mechanical systems) technologies to achieve beam scanning for OCT (Optical Coherence Tomography). The use of MEMS scanners for miniaturized OCT p...
This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are...
In this work, a low-cost, open-source and replicable system prototype for thermal analysis of low-cost Micro Electro-Mechanical Systems (MEMS) Inertial Measurement Unit (IMU) sensors in tilt measurement perspective is presented and tested. The system...
Visual odometry (VO) is a new navigation and positioning method that estimates the ego-motion of vehicles from images. However, VO with unsatisfactory performance can fail severely in hostile environment because of the less feature, fast angular moti...
A novel taxonomy of built-in self-test (BIST) methods is presented for the testing of micro-electro-mechanical systems (MEMS). With MEMS testing representing 50% of the total costs of the end product, BIST solutions that are cost-effective, non-intru...
Compared with conventional solid-state relays, micro-electro mechanical system (MEMS) relays have the advantages of high isolation, low contact resistance, low power consumption, and abrupt switching characteristics. Nevertheless, the widespread appl...
With the development of intelligent machine tools, monitoring the vibration by the accelerometer is an important issue. Accelerometers used for measuring vibration signals during milling processes require the characteristics of high sensitivity, high...
The article offers a comparison of the sensitivities for vapour trace detection of Trinitrotoluene (TNT) explosives of two different sensor systems: a chemo-mechanical sensor based on chemically modified Atomic Force Microscope (AFM) cantilevers base...
Global Navigation Satellite Systems (GNSS), such as the Global Positioning System (GPS), have been widely utilized and their applications are becoming popular, not only in military or commercial applications, but also for everyday life. Although GPS...
Homodyne demodulation is a convenient technique for signal detection in interferometric sensors. The demodulation process is typically developed using analog circuits. However, to improve the performance of the demodulator, a digital system must be e...
In recent years, thanks to the simple and yet efficient design, Micro Electro-Mechanical Systems (MEMS) accelerometers have proven to offer a suitable solution for Structural Health Monitoring (SHM) in civil engineering applications. Such devices are...
Deep Learning strategies recently emerged as powerful tools for the characterization of heterogeneous materials. In this work, we discuss an approach for the characterization of the mechanical response of polysilicon films that typically constitute t...
To explore the versatility of speakers, a piezoelectric micro-electro-mechanical system (MEMS) speaker combining the function of a silent alarm is proposed, which mainly comprises a lead zirconate titanate (PZT) actuation layer and a rigid–flex...
Building on our previous 310-h test of a larger MEMS sensor, this study develops and validates a miniaturized, lift-off-fabricated, and FPC-integrated three-in-one microsensor. In addition to extending the operation to 744 h, we introduce a wireless...
Air pollution poses serious problems as global industrialization continues to thrive. Since air pollution has grave impacts on human health, industry experts are starting to fathom how to integrate particulate matter (PM) sensors into portable device...
We report the design and characterization of a two-photon fluorescence imaging miniature probe. This customized two-axis scanning probe is dedicated for intraoperative two-photon fluorescence imaging endomicroscopic use and is based on a micro-electr...
During pulse signal collection, width information of pulse waves is essential for the diagnosis of disease. However, currently used measuring instruments can only detect the amplitude while can’t acquire the width information. This paper propos...
Device encapsulation and packaging often constitutes a substantial part of the fabrication cost of micro electro-mechanical systems (MEMS) transducers and imaging sensor devices. In this paper, we propose a simple and cost-effective wafer-level cappi...
A development procedure for a low-cost attitude and heading reference system (AHRS) with a self-developed three-axis rotating platform has been proposed. The AHRS consists of one 3-axis accelerometer, three single-axis gyroscopes, and one 3-axis digi...
These days, the market of wireless communications has developed dramatically. Thus, demand increased with respect to wireless communication terminals that consume less power. Consequently, integration technology for passive elements and circuit modul...
With the miniaturization of micro-electro-mechanical system (MEMS) gyroscopes, it is necessary to study their nonlinearity. The phase-frequency characteristics, which affect the start-up time, are crucial for guaranteeing the gyroscopes’ applic...
In this paper, a novel 3D model is proposed to describe the temperature distribution of the thermoelectric microwave power sensor. In this 3D model, the heat flux density decreases from the upper surface to the lower surface of the GaAs substrate whi...
The latest document indicates that the hydrogen/vanadium redox flow battery has better energy density and efficiency than the vanadium redox flow battery, as well as being low-cost and light-weight. In addition, the hydrogen, electrical conductivity,...
In this paper, we introduce a novel type of transdermal drug delivery device (TD3) with a micro-electro-mechanical system (MEMS) design using computer-aided design (CAD) techniques as well as computational fluid dynamics (CFD) simulations regarding t...
To address the limitations of a traditional Fourier-transform infrared (FTIR) spectrometer, including its bulky size, high cost, and unsuitability for on-site industrial detection, this study developed a Fourier-transform near-infrared (FT-NIR) absor...
Cutting force measurement is a quintessential task for status monitoring during machining. In the past, a number of cutting force sensors have been developed, each featuring a different set of performance advantages. In a pursuit to improve the measu...
Polyvinyl Alcohol (PVA) is a promising polymer due to its high solubility with water, availability in low molecular weight, having short polymer chain, and cost-effectiveness in processing. Printed technology is gaining popularity to utilize processi...
Microscale uncertainties related to the geometry and morphology of polycrystalline silicon films, constituting the movable structures of micro electro-mechanical systems (MEMS), were investigated through a joint numerical/experimental approach. An on...
A photoacoustic sensor system (PAS) intended for carbon dioxide (CO2) blood gas detection is presented. The development focuses on a photoacoustic (PA) sensor based on the so-called two-chamber principle, i.e., comprising a measuring cell and a detec...
Pulse wave signal sensed over the radial artery on the wrist is a crucial physiological indicator in disease diagnosis. The sensor array composed of multiple sensors has the ability to collect abundant pulse wave information. As a result, it has grad...
In our recently published paper (Y.-Y. Wang et al., High performance LaNiO3-buffered, (001)-oriented PZT piezoelectric films integrated on (111) Si, Appl. Phys. Lett. 121, 182902, 2022), highly (001)-oriented PZT films with a large transverse piezoel...
Thanks to the support of Inertial Navigation Systems (INS), Global Navigation Satellite Systems (GNSS) provide a navigation positioning solution that, in the absence of satellite signals (in tunnels, forest and urban areas), allows the continuous pos...
Micro electro-mechanical systems (MEMS) combining sensing and microfluidics functionalities, as are common in Lab-on-Chip (LoC) devices, are increasingly based on polymers. Benefits of polymers include tunable material properties, the possibility of...
Micro-electro-mechanical system (MEMS) electromagnetic actuators have rapidly evolved into critical components of various microscale applications, offering significant advantages including precision, controllability, high force density, and rapid res...
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