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Micromachines 2018, 9(1), 30; https://doi.org/10.3390/mi9010030

The Development of a Triaxial Cutting Force Sensor Based on a MEMS Strain Gauge

State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, No. 28, Xianning West Road, Xi’an 710049, China
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Received: 17 November 2017 / Revised: 10 January 2018 / Accepted: 11 January 2018 / Published: 15 January 2018
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Abstract

Cutting force measurement is a quintessential task for status monitoring during machining. In the past, a number of cutting force sensors have been developed, each featuring a different set of performance advantages. In a pursuit to improve the measuring sensitivity and reduce the cross-interference error, in this paper we propose a triaxial cutting force sensor based on a commercial micro-electro-mechanical system (MEMS) strain gauge. An elastic-sensitive element comprised of two mutual-perpendicular octagonal rings is designed for triaxial cutting force measurement, and a decoupling matrix is derived from static calibration to reduce cross-interference. It can be concluded from static calibration that the sensor’s sensitivity is 0.32 mV/N, 0.32 mV/N, and 0.05 mV/N in triaxial directions, and the proposed decoupling matrix is able to reduce cross-interference error to 0.14%, 0.25%, and 4.42%. Dynamic cutting force measurement shows that the cutting force sensor can reflect the variation of cutting status very well, it is qualified to measure triaxial cutting forces in practical applications. View Full-Text
Keywords: cutting force sensor; sensitivity; micro-electro-mechanical system (MEMS) strain gauge; cross-interference; decoupling matrix cutting force sensor; sensitivity; micro-electro-mechanical system (MEMS) strain gauge; cross-interference; decoupling matrix
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Zhao, Y.; Zhao, Y.; Ge, X. The Development of a Triaxial Cutting Force Sensor Based on a MEMS Strain Gauge. Micromachines 2018, 9, 30.

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