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Appl. Sci. 2016, 6(7), 201;

Development of Dual-Axis MEMS Accelerometers for Machine Tools Vibration Monitoring

Department of Mechanical Engineering, National Chin-Yi University of Technology, Taichung 41170, Taiwan
Author to whom correspondence should be addressed.
Academic Editor: César M. A. Vasques
Received: 30 April 2016 / Revised: 21 June 2016 / Accepted: 27 June 2016 / Published: 12 July 2016
(This article belongs to the Special Issue Selected Papers from the 2015 International Conference on Inventions)
Full-Text   |   PDF [4809 KB, uploaded 12 July 2016]   |  


With the development of intelligent machine tools, monitoring the vibration by the accelerometer is an important issue. Accelerometers used for measuring vibration signals during milling processes require the characteristics of high sensitivity, high resolution, and high bandwidth. A commonly used accelerometer is the lead zirconate titanate (PZT) type; however, integrating it into intelligent modules is excessively expensive and difficult. Therefore, the micro electro mechanical systems (MEMS) accelerometer is an alternative with the advantages of lower price and superior integration. In the present study, we integrated two MEMS accelerometer chips into a low-pass filter and housing to develop a low-cost dual-axis accelerometer with a bandwidth of 5 kHz and a full scale range of ±50 g for measuring machine tool vibration. In addition, a platform for measuring the linearity, cross-axis sensitivity and frequency response of the MEMS accelerometer by using the back-to-back calibration method was also developed. Finally, cutting experiments with steady and chatter cutting were performed to verify the results of comparing the MEMS accelerometer with the PZT accelerometer in the time and frequency domains. The results demonstrated that the dual-axis MEMS accelerometer is suitable for monitoring the vibration of machine tools at low cost. View Full-Text
Keywords: Dual-Axis micro electro mechanical systems (MEMS) accelerometer; low cost; vibration of machine tool Dual-Axis micro electro mechanical systems (MEMS) accelerometer; low cost; vibration of machine tool

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Huang, C.-Y.; Chen, J.-H. Development of Dual-Axis MEMS Accelerometers for Machine Tools Vibration Monitoring. Appl. Sci. 2016, 6, 201.

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