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Micromachines 2018, 9(11), 567;

Design and Analysis of the Elastic-Beam Delaying Mechanism in a Micro-Electro-Mechanical Systems Device

Key Laboratory of Space Utilization, Technology and Engineering Center for space Utilization, Chinese Academy of Sciences, Beijing 100094, China
Qian Xuesen Laboratory of Space Technology, NO. 104 Youyi Road, Haidian District, Beijing 100094, China
Author to whom correspondence should be addressed.
Received: 17 October 2018 / Revised: 31 October 2018 / Accepted: 31 October 2018 / Published: 2 November 2018
(This article belongs to the Special Issue MEMS Accelerometers)
PDF [6037 KB, uploaded 2 November 2018]


The delaying mechanism is an important part of micro-electro-mechanical systems (MEMS) devices. However, very few mechanical delaying mechanisms are available. In this paper, an elastic-beam delaying mechanism has been proposed innovatively through establishing a three-dimensional model of an elastic-beam delay mechanism, establishing the force and the parameters of an elastic-beam delay mechanism, deriving the mathematical model according to the rigid dynamic mechanics theory, establishing the finite element model by using Ls-dyna solver of the Ansys software, and carrying out the centrifugal test. Simulation and test results match theoretical results quite well. It is believed that the elastic-beam delaying mechanism is quite effective and useful to slow the speed of the movable part in MEMS devices. View Full-Text
Keywords: micro-electro-mechanical systems (MEMS); delaying mechanism; safety and arming system micro-electro-mechanical systems (MEMS); delaying mechanism; safety and arming system

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Wang, F.; Zhang, L.; Li, L.; Qiao, Z.; Cao, Q. Design and Analysis of the Elastic-Beam Delaying Mechanism in a Micro-Electro-Mechanical Systems Device. Micromachines 2018, 9, 567.

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