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MEMS Scanning Mirrors for Optical Coherence Tomography

1
International Center for Translational Eye Research, Institute of Physical Chemistry, Polish Academy of Sciences, Skierniewicka 10A, 01-230 Warsaw, Poland
2
FEMTO-ST Institute (UMR CNRS 6714/UBFC), 15B Avenue des Montboucons, 25030 Besançon, France
*
Author to whom correspondence should be addressed.
Photonics 2021, 8(1), 6; https://doi.org/10.3390/photonics8010006
Received: 2 October 2020 / Revised: 10 December 2020 / Accepted: 24 December 2020 / Published: 30 December 2020
(This article belongs to the Special Issue Photonic Microsystems)
This contribution presents an overview of advances in scanning micromirrors based on MEMS (Micro-electro-mechanical systems) technologies to achieve beam scanning for OCT (Optical Coherence Tomography). The use of MEMS scanners for miniaturized OCT probes requires appropriate optical architectures. Their design involves a suitable actuation mechanism and an adapted imaging scheme in terms of achievable scan range, scan speed, low power consumption, and acceptable size of the OCT probe. The electrostatic, electromagnetic, and electrothermal actuation techniques are discussed here as well as the requirements that drive the design and fabrication of functional OCT probes. Each actuation mechanism is illustrated by examples of miniature OCT probes demonstrating the effectiveness of in vivo bioimaging. Finally, the design issues are discussed to permit users to select an OCT scanner that is adapted to their specific imaging needs. View Full-Text
Keywords: micro-opto-electro-mechanical system; MEMS scanner; optical coherence tomography micro-opto-electro-mechanical system; MEMS scanner; optical coherence tomography
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MDPI and ACS Style

Gorecki, C.; Bargiel, S. MEMS Scanning Mirrors for Optical Coherence Tomography. Photonics 2021, 8, 6. https://doi.org/10.3390/photonics8010006

AMA Style

Gorecki C, Bargiel S. MEMS Scanning Mirrors for Optical Coherence Tomography. Photonics. 2021; 8(1):6. https://doi.org/10.3390/photonics8010006

Chicago/Turabian Style

Gorecki, Christophe, and Sylwester Bargiel. 2021. "MEMS Scanning Mirrors for Optical Coherence Tomography" Photonics 8, no. 1: 6. https://doi.org/10.3390/photonics8010006

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