- Article
Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections
- Meilin Ji,
- Haolin Yang,
- Yongxin Zhou,
- Xueying Xiu,
- Haochen Lv and
- Songsong Zhang
This paper presents a novel bimorph Piezoelectric Micromachined Ultrasonic Transducer (PMUT) fabricated with 8-inch standard CMOS-compatible processes. The bimorph structure consists of two layers of 20% scandium-doped aluminum nitride (Sc0.2Al0.8N)...

