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Micromachines, Volume 17, Issue 11

2026 November - 1 articles

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Articles (1)

  • Article
  • Open Access
17 Pages
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Measurement and Analysis of an Ultra-Compact Electrostatic MEMS Mirror for Lissajous Scanning Two-Photon Microscopy

  • Siyuan Ma,
  • Biao Yan,
  • Haijun Li,
  • Yanhui Hu,
  • Junjie Wang,
  • Chaowen Zheng,
  • Zhen Liu,
  • Xiulei Zhang,
  • Huilan Liu and
  • Conghao Wang
  • + 3 authors
Micromachines2026, 17(11), 1212;https://doi.org/10.3390/mi17111212 
(registering DOI)

22 October 2026

The imaging performance of a Lissajous scanning two-photon microscopy system employing an ultra-compact electrostatic MEMS mirror depends critically on the stability of the scanning trajectory. However, asymmetry in driving circuit parameters and the...

(This article belongs to the Special Issue Recent Advances in MEMS Mirrors)
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Micromachines - ISSN 2072-666X
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