- Article
Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology
- Shih-Wen Peng,
- Po-Jen Shih and
- Ching-Liang Dai
The fabrication and characterization of a thermoelectric energy harvester using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technology were presented. The thermoelectric energy harvester is composed of eigh...