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Open AccessArticle

Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology

Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan
Department of Civil and Environmental Engineering, National University of Kaohsiung, Kaohsiung 811, Taiwan
Author to whom correspondence should be addressed.
Academic Editor: Cheng Luo
Micromachines 2015, 6(10), 1560-1568;
Received: 15 September 2015 / Revised: 9 October 2015 / Accepted: 12 October 2015 / Published: 16 October 2015
(This article belongs to the Special Issue CMOS-MEMS Sensors and Devices)
The fabrication and characterization of a thermoelectric energy harvester using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technology were presented. The thermoelectric energy harvester is composed of eight circular energy harvesting cells, and each cell consists of 25 thermocouples in series. The thermocouples are made of p-type and n-type polysilicons. The output power of the energy harvester relies on the number of the thermocouples. In order to enhance the output power, the energy harvester increases the thermocouple number per area. The energy harvester requires a post-CMOS process to etch the sacrificial silicon dioxide layer and the silicon substrate to release the suspended structures of hot part. The experimental results show that the energy harvester has an output voltage per area of 0.178 mV·mm−2·K−1 and a power factor of 1.47 × 10−3 pW·mm−2·K−2. View Full-Text
Keywords: MEMS; energy harvester; thermoelectric; CMOS MEMS; energy harvester; thermoelectric; CMOS
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Peng, S.-W.; Shih, P.-J.; Dai, C.-L. Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology. Micromachines 2015, 6, 1560-1568.

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