- Article
Effects of O2 Plasma Treatments on the Photolithographic Patterning of PEDOT:PSS
- Deng-Yun Zheng,
- Meng-Hsiang Chang,
- Ci-Ling Pan and
- Masahito Oh-e
Poly (3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS) is known for its potential to replace indium–tin oxide in various devices. Herein, when fabricating finger-type PEDOT:PSS electrodes using conventional photolithography, the cr...