This study evaluates accelerometer performance of three new state of the art smartphones and focuses on accuracy. The motivating research question was whether accelerator accuracy obtained with these off-the-shelf modern smartphone accelerometers was...
The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagneti...
The micromechanical silicon resonant accelerometer has attracted considerable attention in the research and development of high-precision MEMS accelerometers because of its output of quasi-digital signals, high sensitivity, high resolution, wide dyna...
In a MEMS capacitive accelerometer, there is an offset due to mechanical and electrical factors, and the offset would deteriorate the performance of the accelerometer. Reducing the offset from mechanism would benefit the improvement in performance. Y...
This paper presents a novel capacitive microelectromechanical systems (MEMS) accelerometer with slanted supporting beams and all-silicon sandwich structure. Its sensing mechanism is quite similar to an ordinary sandwich-type MEMS accelerometer, excep...
A novel frequency modulated (FM) accelerometer based on piezoresistive resonators is presented. The accelerometer uses two differential resonators, connected to the accelerometer proofmass by an amplifying leverage mechanism. The piezoresistive doubl...
Bandwidth is an important parameter for accelerometers, in some cases, even surpassing sensitivity. However, there are few studies focused on the relationship between bandwidth and environmental conditions in practical application of accelerometers....
This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated u...
Presented in the paper is the design, the simulation, the fabrication and the experiment of a new z-axis resonant accelerometer based on the electrostatic stiffness. The new z-axis resonant micro-accelerometer, which consists of a torsional accelerom...
The application of MEMS accelerometers used to measure inclination is constrained by their temperature dependence, and each accelerometer needs to be calibrated individually to increase stability and accuracy. This paper presents a calibration and th...
A robust optimization approach for a MEMS accelerometer to minimize the effects of temperature variations is presented. The mathematical model of the accelerometer is built. The effects of temperature variations on the output performance of the accel...
This paper reports a miniaturized piezoelectric accelerometer suitable for a small haptic actuator array. The accelerometer is made with zinc oxide (ZnO) nanowire (NW) grown on a copper wafer by a hydrothermal process. The size of the accelerometer i...
This paper presents the design and testing of a one-axis piezoelectric accelerometer made from cellulose paper and piezoelectric zinc oxide nanowires (ZnO NWs) hydrothermally grown on paper. The accelerometer adopts a cantilever-based configuration w...
A thermal convection-based accelerometer was fabricated, and its characteristics were analyzed in this study. To understand the thermal convection of the accelerometer, the Grashof and Prandtl number equations were analyzed. This study conducted expe...
A subnano-g electrostatic force-rebalanced flexure accelerometer is designed for the rotating accelerometer gravity gradient instrument. This accelerometer has a large proof mass, which is supported inversely by two pairs of parallel leaf springs and...
To solve the problem of resonance during quasi-static calibration of high-g accelerometers, we deduce the relationship between the minimum excitation pulse width and the resonant frequency of the calibrated accelerometer according to the second-order...
Lower stiffness can improve the performance of capacitive-based microelectromechanical systems sensors. In this paper, softened beams, achieved by the electrostatic assembly approach, are proposed to lower the stiffness of a capacitive MEMS accelerom...
This treatise studies the thermal sensitivity of the mechanical and optical transmission coefficients of a microoptoelectromechanical (MOEM) accelerometer based on evanescent coupling in a temperature range from minus 40 to plus 125 °C. Two types...
Long-term observation of Earth’s temporal gravity field with enhanced temporal and spatial resolution is a major objective for future satellite gravity missions. Improving the performance of the accelerometers present in such missions is one of...
A wireless accelerometer has been used in conjunction with a dedicated 3T neonatal MRI system installed on a Neonatal Intensive Care Unit to measure in-plane rotation which is a common problem with neonatal MRI. Rotational data has been acquired in r...
Various high budget industries that utilize wheel-based vehicles rely on wheel odometry as an integral aspect of their navigation process. This research introduces a low-cost alternative for typical wheel encoders that are typically used to determine...
Reducing the size of an accelerometer overcomes the tradeoff between its sensitivity and resonant frequency, and the theoretical relationships are analyzed. A fiber Bragg grating (FBG) accelerometer with the shortest vibration arm, 7 mm, among FBG ac...
On-chip optical accelerometers can be a promising alternative to capacitive, piezo-resistive, and piezo-electric accelerometers in some applications due to their immunity to electromagnetic interference and high sensitivity, which allow for robust op...
Piezoelectric accelerometers have been widely used because of their large range, simple structure, stable performance, and other advantages. With the improvement of science and technology, the application field is expanding, but there are still some...
In this work, we propose an algorithm for joint calibration and axes alignment of a 3-axis accelerometer and a 3-axis magnetometer. The proposed algorithm applies when the two sensors are fixed on the same rigid platform. It achieves accurate calibra...
In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being...
This paper proposes a comprehensive calibration method to improve the precision of a strap-down tri-axis accelerometer unit, in which parameters are divided into static and dynamic ones. The contribution of the manuscript is that it solves the proble...
This paper presents an innovative integrated sensor that combines GNSS and a low-cost accelerometer for bridge health monitoring. GNSS and accelerometers are both significant and effective sensors for structural monitoring, but they each have limitat...
The main errors of MEMS accelerometers are misalignments of their sensitivity axes, thermal and long-term drifts, imprecise factory calibration, and aging phenomena. In order to reduce these errors, a two-axial tilt sensor comprising a triaxial MEMS...
There exists a high level of difficulty in understanding the physical responses of complex dynamical systems. To this end, researchers have previously used different measurement techniques, such as displacement sensors or accelerometers, in the labor...
Accelerometers are mainly used to measure the non-conservative forces at the center of mass of gravity satellites and are the core payloads of gravity satellites. All kinds of disturbances in the satellite platform and the environment will affect the...
In this study, a comb-type capacitive accelerometer based on a silicon carbide (SiC) microstructure is presented and investigated by the finite element method (FEM). It has the advantages of low weight, small volume, and low cross-coupling. Compared...
The three-component accelerometer array has garnered significant attention in seismic wave detection. In this paper, we designed a three-dimensional optical fiber accelerometer based on a circular cross-section cantilever beam and distributed optical...
This paper presents a novel method for the performance of an all-silicon accelerometer by adjusting the ratio of the Si-SiO2 bonding area, and the Au-Si bonding area in the anchor zone, with the aim of eliminating stress in the anchor region. The stu...
Acoustic injection is one of the most dangerous ways of causing micro-electro–mechanical systems (MEMS) failures. In this paper, the failure mechanism of acoustic injection on the microprocessor unit 6050 (MPU6050) accelerometer is investigated...
Micromechanical resonant accelerometers based on electrostatic stiffness have the advantage of it being possible to adjust their sensitivity by changing the detection voltage. However, there is a high-order nonlinear relationship between the output f...
This paper presents the design and simulation of a single-chip integrated MEMS accelerometer gyroscope by integrating a Coriolis vibratory ring gyroscope and a differential resonant accelerometer into one single-chip structure, measuring both the acc...
Dynamic identification using accelerometers is a common technique for measuring the modal frequencies of existing structures. Strategically placing these sensors on a bridge allows for the derivation of its modal parameters through operational modal...
A resonant microbeam accelerometer of a novel highly symmetric structure based on MEMS bulk-silicon technology is proposed and some numerical modeling results for this scheme are presented. The accelerometer consists of two proof masses, four support...
Rotating Accelerometer Gravity Gradiometers (RAGGs) play a significant role in applications such as resource exploration and gravity aided navigation. Scale factor calibration is an essential procedure for RAGG instruments before being used. In this...
Structural health monitoring (SHM) is playing an increasingly important role in ensuring the safety of structures. A shift of SHM research away from traditional wired methods toward the use of wireless smart sensors (WSS) has been motivated by the at...
The Polar H10 is a low-cost wearable with a heart rate monitor and tri-axial accelerometer with potential for many applications. While the device’s heart rate monitor has been widely studied, there is no research validating the accelerometer sp...
We demonstrate a fiber Bragg grating (FBG)-based oscillator-accelerometer in which the acceleration sensitivity can be tuned by controlling the location of the mass oscillator. We theoretically and experimentally investigated the performance of the p...
In order to improve the performance of a micro-electro-mechanical system (MEMS) accelerometer, three algorithms for compensating its temperature drift are proposed in this paper, including deep long short-term memory recurrent neural network (DLSTM-R...
Low Earth Orbit (LEO) satellites have been widely used in scientific fields or commercial applications in recent decades. The demands of the real time scientific research or real time applications require real time precise LEO orbits. Usually, the pr...
This paper presents a micromachined thermal convective accelerometer with low power and high reliability. This accelerometer comprises a heater and two thermistors. The central heater elevates the temperature of the chip above ambient levels while th...
A flexible piezoresistive sensor was developed as an accelerometer based on Graphene/PVDF nanocomposite to detect low-frequency and low amplitude vibration of industrial machines, which may be caused due to misalignment, looseness of fasteners, or ec...
In this work we demonstrate that the 805M1 single axis analogue output accelerometer can be used to monitor honey bee activity and requires only a low-cost microcontroller with an audio shield to log the data. We present accelerometer output signals...
This paper characterizes the sensitivity of a time domain MEMS accelerometer. The sensitivity is defined by the increment in the measured time interval per gravitational acceleration. Two sensitivities exist, and they can be enhanced by decreasing th...
A tri-axis accelerometer with a digital readout circuit and communication system is introduced. It is composed of two resonant accelerometers in the x and y-axis, and a seesaw capacitive one in the z-axis. The device is encapsulated in air to ensure...
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