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Sensors 2016, 16(9), 1499;

Fabrication of a Miniaturized ZnO Nanowire Accelerometer and Its Performance Tests

Creative Research Center for Nanocellulose Future Composites, Department of Mechanical Engineering, Inha University, 100 Inha-Ro, Nam-Ku, Incheon 22212, Korea
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 21 July 2016 / Revised: 29 August 2016 / Accepted: 8 September 2016 / Published: 14 September 2016
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
Full-Text   |   PDF [5755 KB, uploaded 14 September 2016]   |  


This paper reports a miniaturized piezoelectric accelerometer suitable for a small haptic actuator array. The accelerometer is made with zinc oxide (ZnO) nanowire (NW) grown on a copper wafer by a hydrothermal process. The size of the accelerometer is 1.5 × 1.5 mm2, thus fitting the 1.8 × 1.8 mm2 haptic actuator array cell. The detailed fabrication process of the miniaturized accelerometer is illustrated. Performance evaluation of the fabricated accelerometer is conducted by comparing it with a commercial piezoelectric accelerometer. The output current of the fabricated accelerometer increases linearly with the acceleration. The miniaturized ZnO NW accelerometer is feasible for acceleration measurement of small and lightweight devices. View Full-Text
Keywords: accelerometer; ZnO nanowire; miniaturization; piezoelectric; micro fabrication accelerometer; ZnO nanowire; miniaturization; piezoelectric; micro fabrication

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Kim, H.C.; Song, S.; Kim, J. Fabrication of a Miniaturized ZnO Nanowire Accelerometer and Its Performance Tests. Sensors 2016, 16, 1499.

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