- Review
Comprehensive Review on the Impact of Chemical Composition, Plasma Treatment, and Vacuum Ultraviolet (VUV) Irradiation on the Electrical Properties of Organosilicate Films
- Mikhail R. Baklanov,
- Andrei A. Gismatulin,
- Sergej Naumov,
- Timofey V. Perevalov,
- Vladimir A. Gritsenko,
- Alexey S. Vishnevskiy,
- Tatyana V. Rakhimova and
- Konstantin A. Vorotilov
Organosilicate glass (OSG) films are a critical component in modern electronic devices, with their electrical properties playing a crucial role in device performance. This comprehensive review systematically examines the influence of chemical composi...