- Article
A Method for Improving Heat Dissipation and Avoiding Charging Effects for Cavity Silicon-on-Glass Structures
- Junduo Wang,
- Yuwei Hu,
- Lei Qian,
- Yameng Shan and
- Wenjiang Shen
Anode bonding is a widely used method for fabricating devices with suspended structures, and this approach is often combined with deep reactive-ion etching (DRIE) for releasing the device; however, the DRIE process with a glass substrate can potentia...

