- Communication
Developing an Interferogram-Based Module with Machine Learning for Maintaining Leveling of Glass Substrates
- Syuan-Cheng Chang,
- Chung-Ping Chang,
- Yung-Cheng Wang and
- Chi-Chieh Chu
In this research, we propose a method that utilizes machine learning to maintain the parallelism of the resonant cavity in a Fabry–Perot interferometer designed specifically for glass substrates. Based on the optical principle and theory, we es...

