- Article
Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting
- Dae Jin Yun,
- Tae Il Seo and
- Dong Sam Park
For microfabrications of biochips with micro fluidic channels, a large number of microfabrication techniques based on silicon or glass-based Micro-Electro-Mechanical System (MEMS) technologies were proposed in the last decade. In recent years, for lo...