Micromachines, Volume 11, Issue 8

An inverted ridge 3D thermal optical (TO) switch of a graphene-coated polymer/silica hybrid waveguide is proposed. The side electrode structure is designed to reduce the mode loss induced by the graphene film and by heating the electrode. The graphen...

An extended version of cross-bar type addressing technique is developed for three-port electrostatic micro shutters arranged in an arrayed format. A microelectromechanical systems (MEMS) shutter blade suspended by a pair of torsion beams works as a m...

Electronic devices that transmit, distribute, or utilize electrical energy create electromagnetic interference (EMI) that can lead to malfunctioning and degradation of electronic devices. EMI shielding materials block the unwanted electromagnetic wav...

The design and modeling of a highly sensitive sensor based on a slot photonic crystal waveguide (slot-PCWG) is presented. The structure consists of cylindrical air rods drilled in a dielectric slab on a triangular lattice, which are filled with SiO₂....

The absorption and binding energy of material plays an important role with a large surface area and conductivity for the development of any sensing device. The newly grown 2D nanomaterials like black phosphorus transition metal dichalcogenides (TMDCs...

In this paper, an investigation is performed to analyze the L-shaped tunnel field-effect transistor (TFET) depending on a gate work function variation (WFV) with help of technology computer-aided design (TCAD) simulation. Depending on the gate voltag...

As an important actuator of the dual parallel jet, the porous nozzle has some non-structural parameters (such as inlet pressure, nozzle spacing ratio, etc.) which have a significant influence on energy transport, chemical combustion and pollutant gen...

Paper-based microfluidic devices are an attractive platform for developing low-cost, point-of-care diagnostic tools. As paper-based devices’ detection chemistries become more complex, more complicated devices are required, often entailing the s...

Circulating tumor cells (CTCs), a type of cancer cell that spreads from primary tumors into human peripheral blood and are considered as a new biomarker of cancer liquid biopsy. It provides the direction for understanding the biology of cancer metast...

In this editorial note, we briefly review the major findings of the 10 articles published in the Special Issue on microelectrode arrays and application to medical devices [...]

Microabrasive-based lapping is widely used in the manufacturing of single-crystal substrates such as sapphire, SiC, and GaN. Although many studies have been conducted to improve the lapping process characteristics, most of them focused on process con...

Free air ball (FAB) and bonded strength were performed on an Ag-10Au-3.6Pd alloy bonding wire (diameter of 0.025 mm) for different electronic flame-off (EFO) currents, times and bonding parameters. The effects of the EFO and bonding parameters on the...

A convex spiral phaser array (CSPA) is designed and fabricated to generate typical convergent Laguerre-Gaussian (LG) beams. A type of 3D printing technology based on the two-photon absorption effect is used to make the CSPAs with different featured s...

Ammonia (NH₃)-assisted purification of deposits fabricated by focused electron beam-induced deposition (FEBID) has recently been proven successful for the removal of halide contaminations. Herein, we demonstrate the impact of combined NH₃ and electro...

Flexible tactile sensors have been utilized in intelligent robotics for human-machine interaction and healthcare monitoring. The relatively low flexibility, unbalanced sensitivity and sensing range of the tactile sensors are hindering the accurate ta...

The piezoelectrically-actuated stick-slip nanopositioning stage (PASSNS) has been applied extensively, and many designs of PASSNSs have been developed. The friction force between the stick-slip surfaces plays a critical role in successful movement of...

Optimization of cutting parameters in micro-milling is an important measure to improve surface quality and machining efficiency of the workpiece. Investigation of micro-milling forces prediction plays a positive role in improving machining capacity....

A novel electroporation system was developed to introduce transient membrane pores to cells in a spatially and temporally controlled manner, allowing us to achieve fast electrotransfection and live cell staining as well as to systematically interroga...

The use of drones in combination with remote sensors have displayed increasing interest over the last years due to its potential to automate monitoring processes. In this study, a novel approach of a small flying e-nose is proposed by assembling a se...

To create approximately spherical structures with curved sidewalls, this paper presents a method for building a series of decreasing slopes along the sidewall of a circular truncated cone. The multistep ring-edge etching technology of first reducing...

In the method of monitoring the liquid level based on ultrasonic impedance, the near-field effect can seriously affect the validity of the results. In this paper, we explore the factors affecting the length of the ultrasonic near field. Based on that...

Photo-responsive cell attachment surfaces can simplify patterning and recovery of cells in microdevices for medicinal and pharmaceutical research. We developed a photo-responsive surface for controlling the attachment and release of adherent cells on...

There is some incertitude on the creation of the term “photonics” and some ambiguity about its frontiers (and differences with respect to optoelectronics and electro-optics) [...]

Multiplex polymerase chain reaction (PCR) is an effective tool for simultaneous detection of target genes. Nevertheless, their use has been restricted due to the intrinsic interference between primer pairs. Performing several single PCRs in an array...

Although check valves have attracted a lot of attention, work has rarely been completed done when there is a compressible working fluid. In this paper, the swing check valve and the tilting check valve flowing high-temperature compressible water vapo...

Double-sides polishing technology has the advantages of high flatness and parallelism, and high polishing efficiency. It is the preferred polishing method for the preparation of ultra-thin sapphire wafer. However, the clamping method is a fundamental...

In this investigation, the transient electroosmotic flow of multi-layer immiscible viscoelastic fluids in a slit microchannel is studied. Through an appropriate combination of the momentum equation with the rheological model for Maxwell fluids, an hy...

Hospitals are continuously working to reduce delayed analysis and specimen errors during transfers from testing stations to clinical laboratories. Radio-frequency identification (RFID) tags, which provide automated specimen labeling and tracking, hav...

In this paper, we report a novel microfluidic method to conduct a Caenorhabditis elegans electrotaxis movement assay and neuronal imaging on up to 16 worms in parallel. C. elegans is a model organism for neurodegenerative disease and movement disorde...

Inflammation is the initiation of defense of our body against harmful stimuli. Lipopolysaccharide (LPS), originating from outer membrane of Gram-negative bacteria, causes inflammation in the animal’s body and can develop several diseases. In or...

Auxetic structures have attracted attention in energy absorption applications owing to their improved shear modulus and enhanced resistance to indentation. On the other hand, four-dimensional (4D) printing is an emerging technology that is capable of...

While band gap and absorption coefficients are intrinsic properties of a material and determine its spectral range, response time is mainly controlled by the architecture of the device and electron/hole mobility. Further, 2D-layered materials such as...

Traditional silicon-based micro-electro-mechanical system (MEMS) safety and arming devices, such as electro-thermal and electrostatically driven MEMS safety and arming devices, experience problems of high insecurity and require high voltage drive. Fo...

Recently, microdevices made of resins have been strongly supporting cell analysis in a range of fields, from fundamental life science research to medical applications. Many microdevices are fabricated by molding resin to a mold made precisely from ri...

Acoustophoretic blood plasma separation is based on cell enrichment processes driven by acoustic radiation forces. The combined influence of hematocrit and hydrodynamics has not yet been quantified in the literature for these processes acoustically i...

Piezoelectric micro-pumps offer many applications and could provide considerable flow rates in miniature systems. This study parametrically investigates the effects of major parameters, namely the length, width and attack angle of valves, piezoelectr...

To solve the problem of vibration motor fault detection accuracy and inefficiency in smartphone components, this paper proposes a fault diagnosis method based on the wavelet packet and improves long and short-term memory network. First, the voltage s...

Electrical discharge machining (EDM) is an advanced machining method which removes metal by a series of recurring electrical discharges between an electrode and a conductive workpiece, submerged in a dielectric fluid. Even though EDM techniques are w...

A unique approach is proposed to boost on-chip immuno-sensors, for instance, immunoassays, wherein an antibody immobilized on the walls of a microfluidic channel binds specifically to an antigen suspended freely within a working fluid. The performanc...

The avalanche photodiode is a highly sensitive photon detector with wide applications in optical communication and single photon detection. ZnO is a promising wide band gap material to realize a UV avalanche photodiode (APD). However, the lack of p-t...

We introduce a single-grain gate-all-around (GAA) Si nanowire (NW) FET using the location-controlled-grain technique and several innovative low-thermal budget processes, including green nanosecond laser crystallization, far-infrared laser annealing,...

A molecular dynamics model of the diamond abrasive polishing the single crystal silicon is established. Crystal surfaces of the single crystal silicon in the Y-direction are (010), (011), and (111) surfaces, respectively. The effects of crystallograp...

The demand for highly controllable droplet generation methods is very urgent in the medical, materials, and food industries. The droplet generation in a flow-focusing microfluidic device with external mechanical vibration, as a controllable droplet g...

Metal-assisted chemical etching (MACE) is widely used to fabricate micro-/nano-structured Si owing to its simplicity and cost-effectiveness. The technique of magnetically guided MACE, involving MACE with a tri-layer metal catalyst, was developed to i...

The design or dimension of micro-supercapacitor electrodes is an important factor that determines their performance. In this study, a microsupercapacitor was precisely fabricated on a silicon substrate by irradiating an imprinted furan micropattern w...

Epilepsy is a common neurological disorder. There is still a lack of methods to accurately detect cortical activity and locate lesions. In this work, a flexible electrocorticography (ECoG) electrode array based on polydimethylsiloxane (PDMS)-parylene...

In this work, a burst mode laser is used for micromachining of 20 µm–250 µm thick Invar (Fe64/Ni36) foils. Holes were drilled by firing multiple pulses transversely onto the sample without moving the beam (percussion drilling). The...

Pluripotent stem cells (PSCs) are considered as being an important cell source for regenerative medicine. The culture of PSCs usually requires a feeder cell layer or cell adhesive matrix coating such as Matrigel, laminin, and gelatin. Although a feed...

As piezoelectric pumps are used in more fields, they are gradually failing to meet the application requirements due to their low output performance. Therefore, improving the output performance of piezoelectric pumps helps to expand their applications...

To analyze the reliability of semiconductor transistors, changes in the performance of the devices during operation are evaluated. A prominent effect altering the device behavior are the so called bias temperature instabilities (BTI), which emerge as...