Nanofabrication with Focused Electron/Ion Beam Induced Processing
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D:Materials and Processing".
Deadline for manuscript submissions: closed (30 November 2020) | Viewed by 33597
Special Issue Editor
Interests: nanofabrication; focused electron beam induced deposition; focused ion beam induced deposition and processing; functional nanostructures; hybrid 2D materials
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Focused electron beam (FEB) and focused ion beam (FIB) technologies have revolutionized material science research and technology, and they have offered novel possibilities for material imaging, analysis, modification, and fabrication with high spatial resolution mainly using electrons and gallium, neon, and helium ions.
In the last few years, several experimental and theoretical approaches have been developed and implemented in the area, such as deposition, etching, and sputtering, to broaden the applications of focused electron/ion beam induced processing.
This Special Issue aims to provide an in-depth overview on the current status of nanofabrication with focused electron/ion beam induced processing though research papers, short communications, and review articles. Topics include experimental and theoretical contributions on modification and nanofabrication with FEB and FIB-induced processing.
Some examples of its applications are: 1) the material modification by a focused ion beam, such as the tuning of material properties by irradiation, material removal by milling and sputtering, and material addition by focused electron beam in the three dimensions of space; 2) material modification by a focused electron beam, such as the tuning of material properties by irradiation, material removal by etching, and the material addition by focused electron beam in the three dimensions of space; and 3) theoretical approaches of focused electron/ion beam induced processing.
Dr. Rosa Córdoba
Guest Editor
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Keywords
- 3D nanoprinting
- Additive nanofabrication and material applications
- Subtractive nanofabrication and material applications
- Theoretical approaches of processing
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