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Micromachines
Volume 11
Issue 8
10.3390/mi11080769
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Article

Combined Ammonia and Electron Processing of a Carbon-Rich Ruthenium Nanomaterial Fabricated by Electron-Induced Deposition

by
Markus Rohdenburg
1,*,
Johannes E. Fröch
2,
Petra Martinović
1,
Charlene J. Lobo
2 and
Petra Swiderek
1,*
1
Institute for Applied and Physical Chemistry (IAPC), Fachbereich 2 (Chemie/Biologie), University of Bremen, Leobener Str. 5 (NW2), 28359 Bremen, Germany
2
School of Mathematical and Physical Sciences, University of Technology Sydney, Ultimo, NSW 2007, Australia
*
Authors to whom correspondence should be addressed.
Micromachines 2020, 11(8), 769; https://doi.org/10.3390/mi11080769
Submission received: 13 July 2020 / Revised: 6 August 2020 / Accepted: 10 August 2020 / Published: 12 August 2020
(This article belongs to the Special Issue Nanofabrication with Focused Electron/Ion Beam Induced Processing)
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Abstract

Ammonia (NH3)-assisted purification of deposits fabricated by focused electron beam-induced deposition (FEBID) has recently been proven successful for the removal of halide contaminations. Herein, we demonstrate the impact of combined NH3 and electron processing on FEBID deposits containing hydrocarbon contaminations that stem from anionic cyclopentadienyl-type ligands. For this purpose, we performed FEBID using bis(ethylcyclopentadienyl)ruthenium(II) as the precursor and subjected the resulting deposits to NH3 and electron processing, both in an environmental scanning electron microscope (ESEM) and in a surface science study under ultrahigh vacuum (UHV) conditions. The results provide evidence that nitrogen from NH3 is incorporated into the carbon content of the deposits which results in a covalent nitride material. This approach opens a perspective to combine the promising properties of carbon nitrides with respect to photocatalysis or nanosensing with the unique 3D nanoprinting capabilities of FEBID, enabling access to a novel class of tailored nanodevices.
Keywords: focused electron beam-induced deposition; deposit post-processing; ammonia; Ru deposition; carbon nitride focused electron beam-induced deposition; deposit post-processing; ammonia; Ru deposition; carbon nitride

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MDPI and ACS Style

Rohdenburg, M.; Fröch, J.E.; Martinović, P.; Lobo, C.J.; Swiderek, P. Combined Ammonia and Electron Processing of a Carbon-Rich Ruthenium Nanomaterial Fabricated by Electron-Induced Deposition. Micromachines 2020, 11, 769. https://doi.org/10.3390/mi11080769

AMA Style

Rohdenburg M, Fröch JE, Martinović P, Lobo CJ, Swiderek P. Combined Ammonia and Electron Processing of a Carbon-Rich Ruthenium Nanomaterial Fabricated by Electron-Induced Deposition. Micromachines. 2020; 11(8):769. https://doi.org/10.3390/mi11080769

Chicago/Turabian Style

Rohdenburg, Markus, Johannes E. Fröch, Petra Martinović, Charlene J. Lobo, and Petra Swiderek. 2020. "Combined Ammonia and Electron Processing of a Carbon-Rich Ruthenium Nanomaterial Fabricated by Electron-Induced Deposition" Micromachines 11, no. 8: 769. https://doi.org/10.3390/mi11080769

APA Style

Rohdenburg, M., Fröch, J. E., Martinović, P., Lobo, C. J., & Swiderek, P. (2020). Combined Ammonia and Electron Processing of a Carbon-Rich Ruthenium Nanomaterial Fabricated by Electron-Induced Deposition. Micromachines, 11(8), 769. https://doi.org/10.3390/mi11080769

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