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Article

Random Access Addressing of MEMS Electrostatic Shutter Array for Multi-Object Astronomical Spectroscopy

1
Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan
2
Institute of Astronomy, School of Science, The University of Tokyo, Tokyo 181-0015, Japan
3
National Astronomical Observatory of Japan, Tokyo 181-8588, Japan
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(8), 782; https://doi.org/10.3390/mi11080782
Received: 29 July 2020 / Revised: 14 August 2020 / Accepted: 15 August 2020 / Published: 17 August 2020
(This article belongs to the Special Issue Optical MEMS, Volume II)
An extended version of cross-bar type addressing technique is developed for three-port electrostatic micro shutters arranged in an arrayed format. A microelectromechanical systems (MEMS) shutter blade suspended by a pair of torsion beams works as a movable electrode that is either attracted upwards to the cover plate to close the aperture or retracted downwards into the through-hole to open it. Tri-state positioning of the shutter—i.e., open, rest, and close—is controlled by the hysteresis loop of the electrostatic pull-in and release behavior using the combination of the voltages applied to the shutter, the cover, and the substrate. Random access addressing of the shutters is demonstrated by a control system composed of MATLAB-coded Arduino electronics. The shutter array developed in this work is for a sub-cluster of a reconfigurable shutter array under development for a multi-object galactic astronomy. View Full-Text
Keywords: electrostatic; actuator; multi-object spectroscopy; random access addressing electrostatic; actuator; multi-object spectroscopy; random access addressing
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MDPI and ACS Style

Liu, X.; Takahashi, T.; Konishi, M.; Motohara, K.; Toshiyoshi, H. Random Access Addressing of MEMS Electrostatic Shutter Array for Multi-Object Astronomical Spectroscopy. Micromachines 2020, 11, 782. https://doi.org/10.3390/mi11080782

AMA Style

Liu X, Takahashi T, Konishi M, Motohara K, Toshiyoshi H. Random Access Addressing of MEMS Electrostatic Shutter Array for Multi-Object Astronomical Spectroscopy. Micromachines. 2020; 11(8):782. https://doi.org/10.3390/mi11080782

Chicago/Turabian Style

Liu, Xufeng, Takuya Takahashi, Masahiro Konishi, Kentaro Motohara, and Hiroshi Toshiyoshi. 2020. "Random Access Addressing of MEMS Electrostatic Shutter Array for Multi-Object Astronomical Spectroscopy" Micromachines 11, no. 8: 782. https://doi.org/10.3390/mi11080782

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