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Micromachines, Volume 11, Issue 9

2020 September - 99 articles

Cover Story: Bioinspired compound eyes have drawn extensive attention in recent years for their wide field of view, compact structure, and sensitive response to moving objects. However, the application of the element in optical systems is restricted by the manufacture of massive multifocal microlenses on a curvature-controllable spherical surface. In this paper, we propose a fabrication of a one-lens compound eye by combining photolithography, hot embossing, soft photolithography, and gas-assisted deformation techniques, and the ommatidia in different positions can steer and focus incident rays on the same plane. Our approach paves a way towards the convenient integration of compound eyes in medical imaging and military monitoring systems. View this paper
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Articles (99)

  • Article
  • Open Access
5 Citations
4,411 Views
15 Pages

Accelerating the Finite-Element Method for Reaction-Diffusion Simulations on GPUs with CUDA

  • Hedi Sellami,
  • Leo Cazenille,
  • Teruo Fujii,
  • Masami Hagiya,
  • Nathanael Aubert-Kato and
  • Anthony J. Genot

22 September 2020

DNA nanotechnology offers a fine control over biochemistry by programming chemical reactions in DNA templates. Coupled to microfluidics, it has enabled DNA-based reaction-diffusion microsystems with advanced spatio-temporal dynamics such as traveling...

  • Article
  • Open Access
6 Citations
4,021 Views
13 Pages

Low-Cost Graphene-Based Digital Microfluidic System

  • Mohamed Yafia,
  • Amir M. Foudeh,
  • Maryam Tabrizian and
  • Homayoun Najjaran

22 September 2020

In this work, the laser-scribing technique was used as a low-cost, rapid and facile method for fabricating digital microfluidic (DMF) systems. Laser-scribed graphene (LSG) electrodes are directly synthesized on flexible substrates to pattern the DMF...

  • Feature Paper
  • Article
  • Open Access
32 Citations
4,576 Views
13 Pages

Single-Cell Elasticity Measurement with an Optically Actuated Microrobot

  • István Grexa,
  • Tamás Fekete,
  • Judit Molnár,
  • Kinga Molnár,
  • Gaszton Vizsnyiczai,
  • Pál Ormos and
  • Lóránd Kelemen

22 September 2020

A cell elasticity measurement method is introduced that uses polymer microtools actuated by holographic optical tweezers. The microtools were prepared with two-photon polymerization. Their shape enables the approach of the cells in any lateral direct...

  • Article
  • Open Access
10 Citations
3,464 Views
17 Pages

21 September 2020

In order to study the penetration mechanism of jacked piles in viscous soil foundation, the stress variation law of the pile–soil interface was obtained by installing silicon piezoresistive earth pressure and pore water pressure sensors, and fi...

  • Article
  • Open Access
4 Citations
3,702 Views
10 Pages

Cu(In,Ga)Se2 Solar Cells Integrated with Subwavelength Structured Cover Glass Fabricated by One-Step Self-Masked Etching

  • Ho-Jung Jeong,
  • Ye-Chan Kim,
  • Sung-Tae Kim,
  • Min-Ho Choi,
  • Young-Hyun Song,
  • Ju-Hyung Yun,
  • Min-Su Park and
  • Jae-Hyung Jang

21 September 2020

We report an anti-reflective cover glass for Cu(In,Ga)Se2 (CIGS) thin film solar cells. Subwavelength structures (SWSs) were fabricated on top of a cover glass using one-step self-masked etching. The etching method resulted in dense whiskers with hig...

  • Article
  • Open Access
2 Citations
3,158 Views
11 Pages

Revealing the Plastic Mode of Time-Dependent Deformation of a LiTaO3 Single Crystal by Nanoindentation

  • Shengyun Zhou,
  • Xianwei Huang,
  • Congda Lu,
  • Yunfeng Liu,
  • Taihua Zhang and
  • Yi Ma

21 September 2020

Recently, instrumental nanoindentation has been widely applied to detect time-dependent plastic deformation or creep behavior in numerous materials, particularly thin films and heterogeneous materials. However, deformation mechanism at nanoindentatio...

  • Article
  • Open Access
3 Citations
3,145 Views
12 Pages

20 September 2020

The static and dynamic deflection transducing performances of piezotransistive AlGaN/GaN heterojunction field effect transistors (HFET) and piezoresistive VO2 thin films, fabricated on GaN microcantilevers of similar dimensions, were investigated. De...

  • Article
  • Open Access
17 Citations
7,012 Views
25 Pages

19 September 2020

This paper presents a multiple-input, multiple-output (MIMO) antenna system with the ability to perform full-azimuth beam steering, and with the aim of realizing greater than 20 Gbps vehicular communications. The MIMO antenna described in this paper...

  • Article
  • Open Access
3,299 Views
13 Pages

19 September 2020

Microfluidic principles have been widely applied for more than 30 years to solve biological and micro-electromechanical problems. Despite the numerous advantages, microfluidic devices are difficult to manage as their handling comes with several techn...

  • Article
  • Open Access
14 Citations
3,847 Views
13 Pages

19 September 2020

Circulating tumor cells (CTCs) are important biomarkers for the diagnosis, prognosis, and treatment of cancer. However, because of their extreme rarity, a more precise technique for isolating CTCs is required to gain deeper insight into the character...

  • Feature Paper
  • Article
  • Open Access
86 Citations
9,106 Views
12 Pages

Fused Deposition Modeling of Microfluidic Chips in Polymethylmethacrylate

  • Frederik Kotz,
  • Markus Mader,
  • Nils Dellen,
  • Patrick Risch,
  • Andrea Kick,
  • Dorothea Helmer and
  • Bastian E. Rapp

19 September 2020

Polymethylmethacrylate (PMMA) is one of the most important thermoplastic materials and is a widely used material in microfluidics. However, PMMA is usually structured using industrial scale replication processes, such as hot embossing or injection mo...

  • Article
  • Open Access
6 Citations
3,327 Views
13 Pages

19 September 2020

Three-dimensional (3D) microelectrodes used for processing 3D microstructures in micro-electrical discharge machining (micro-EDM) can be readily prepared by laminated object manufacturing (LOM). However, the microelectrode surface always appears with...

  • Article
  • Open Access
6 Citations
4,652 Views
14 Pages

Avalanche Transients of Thick 0.35 µm CMOS Single-Photon Avalanche Diodes

  • Bernhard Goll,
  • Bernhard Steindl and
  • Horst Zimmermann

19 September 2020

Two types of single-photon avalanche diodes (SPADs) with different diameters are investigated regarding their avalanche behavior. SPAD type A was designed in standard 0.35-µm complementary metal-oxide-semiconductor (CMOS) including a 12-µ...

  • Article
  • Open Access
23 Citations
4,856 Views
12 Pages

Inkjet-Printed Graphene-Based 1 × 2 Phased Array Antenna

  • Mahmuda Akter Monne,
  • Peter Mack Grubb,
  • Harold Stern,
  • Harish Subbaraman,
  • Ray T. Chen and
  • Maggie Yihong Chen

18 September 2020

Low-cost and conformal phased array antennas (PAAs) on flexible substrates are of particular interest in many applications. The major deterrents to developing flexible PAA systems are the difficulty in integrating antenna and electronics circuits on...

  • Article
  • Open Access
55 Citations
11,355 Views
13 Pages

Towards the Fabrication of High-Aspect-Ratio Silicon Gratings by Deep Reactive Ion Etching

  • Zhitian Shi,
  • Konstantins Jefimovs,
  • Lucia Romano and
  • Marco Stampanoni

18 September 2020

The key optical components of X-ray grating interferometry are gratings, whose profile requirements play the most critical role in acquiring high quality images. The difficulty of etching grating lines with high aspect ratios when the pitch is in the...

  • Feature Paper
  • Review
  • Open Access
34 Citations
8,123 Views
21 Pages

18 September 2020

Neuroprosthetics have become a powerful toolkit for clinical interventions of various diseases that affect the central nervous or peripheral nervous systems, such as deep brain stimulation (DBS), functional electrical stimulation (FES), and vagus ner...

  • Review
  • Open Access
85 Citations
10,048 Views
37 Pages

Graphene Quantum Dots as Flourishing Nanomaterials for Bio-Imaging, Therapy Development, and Micro-Supercapacitors

  • Merve Kortel,
  • Bhargav D. Mansuriya,
  • Nicole Vargas Santana and
  • Zeynep Altintas

18 September 2020

Graphene quantum dots (GQDs) are considerably a new member of the carbon family and shine amongst other members, thanks to their superior electrochemical, optical, and structural properties as well as biocompatibility features that enable us to engag...

  • Article
  • Open Access
12 Citations
4,196 Views
13 Pages

18 September 2020

With the ever-growing demand in fresh water supply, great efforts have been devoted to developing sustainable systems which could generate fresh water continuously. Solar vapor generation is one of the promising strategies which comprise an unlimited...

  • Article
  • Open Access
9 Citations
3,459 Views
11 Pages

17 September 2020

The key characteristics of bending sensors are piezoresistive effect, hysteresis, and durability. In this study, to investigate the influence of the aspect ratio and contents of multi-walled nanotubes (MWNTs) on the properties of bending sensors, MWN...

  • Article
  • Open Access
20 Citations
4,575 Views
14 Pages

Electrochemical Performance of Micropillar Array Electrodes in Microflows

  • Bo Liu,
  • Chuanwen Lv,
  • Chaozhan Chen,
  • Bin Ran,
  • Minbo Lan,
  • Huaying Chen and
  • Yonggang Zhu

17 September 2020

The microchip-based electrochemical detection system (μEDS) has attracted plenty of research attention due to its merits including the capability in high-density integration, high sensitivity, fast analysis time, and reduced reagent consumption. T...

  • Communication
  • Open Access
4 Citations
6,439 Views
12 Pages

Broadband High-Efficiency Grating Couplers for Perfectly Vertical Fiber-to-Chip Coupling Enhanced by Fabry-Perot-like Cavity

  • Zan Zhang,
  • Beiju Huang,
  • Zanyun Zhang,
  • Chuantong Cheng,
  • Bing Bai,
  • Tianxi Gao,
  • Xiaobo Xu,
  • Wenping Gu,
  • Lin Zhang and
  • Hongda Chen

17 September 2020

We propose a broadband high-efficiency grating coupler for perfectly vertical fiber-to-chip coupling. The up-reflection is reduced, hence enhanced coupling efficiency is achieved with the help of a Fabry-Perot-like cavity composed of a silicon nitrid...

  • Article
  • Open Access
2 Citations
3,678 Views
22 Pages

Electromechanical Modeling of Vibration-Based Piezoelectric Nanogenerator with Multilayered Cross-Section for Low-Power Consumption Devices

  • Ernesto A. Elvira-Hernández,
  • Juan C. Anaya-Zavaleta,
  • Eustaquio Martínez-Cisneros,
  • Francisco López-Huerta,
  • Luz Antonio Aguilera-Cortés and
  • Agustín L. Herrera-May

17 September 2020

Piezoelectric nanogenerators can convert energy from ambient vibrations into electrical energy. In the future, these nanogenerators could substitute conventional electrochemical batteries to supply electrical energy to consumer electronics. The optim...

  • Article
  • Open Access
46 Citations
18,635 Views
18 Pages

A Tumbling Magnetic Microrobot System for Biomedical Applications

  • Elizabeth E. Niedert,
  • Chenghao Bi,
  • Georges Adam,
  • Elly Lambert,
  • Luis Solorio,
  • Craig J. Goergen and
  • David J. Cappelleri

17 September 2020

A microrobot system comprising an untethered tumbling magnetic microrobot, a two-degree-of-freedom rotating permanent magnet, and an ultrasound imaging system has been developed for in vitro and in vivo biomedical applications. The microrobot tumbles...

  • Article
  • Open Access
19 Citations
5,721 Views
26 Pages

Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

  • Syed Ali Raza Bukhari,
  • Muhammad Mubasher Saleem,
  • Umar Shahbaz Khan,
  • Amir Hamza,
  • Javaid Iqbal and
  • Rana Iqtidar Shakoor

17 September 2020

This paper presents microfabrication process-driven design of a multi-degree of freedom (multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope by considering the design constraints of commercially available low-cost an...

  • Article
  • Open Access
20 Citations
4,643 Views
12 Pages

Fabrication and Characterization of Curved Compound Eyes Based on Multifocal Microlenses

  • Gaoge Lian,
  • Yongshun Liu,
  • KeKai Tao,
  • Huaming Xing,
  • Ruxia Huang,
  • Mingbo Chi,
  • Wenchao Zhou and
  • Yihui Wu

16 September 2020

Curved compound eyes have generated great interest owing to the wide field of view but the application of devices is hindered for the lack of proper detectors. One-lens curved compound eyes with multi-focal microlenses provide a solution for wide fie...

  • Feature Paper
  • Review
  • Open Access
15 Citations
7,405 Views
24 Pages

16 September 2020

Neurodegenerative diseases are among the most severe problems in aging societies. Various conventional experimental models, including 2D and animal models, have been used to investigate the pathogenesis of (and therapeutic mechanisms for) neurodegene...

  • Feature Paper
  • Communication
  • Open Access
20 Citations
5,612 Views
12 Pages

Single-Cell Electroporation with Real-Time Impedance Assessment Using a Constriction Microchannel

  • Yifei Ye,
  • Xiaofeng Luan,
  • Lingqian Zhang,
  • Wenjie Zhao,
  • Jie Cheng,
  • Mingxiao Li,
  • Yang Zhao and
  • Chengjun Huang

16 September 2020

The electroporation system can serve as a tool for the intracellular delivery of foreign cargos. However, this technique is presently limited by the inaccurate electric field applied to the single cells and lack of a real-time electroporation metrics...

  • Review
  • Open Access
11 Citations
7,408 Views
17 Pages

Miniaturization and 3D Printing of Bioreactors: A Technological Mini Review

  • Spyridon Achinas,
  • Jorn-Ids Heins,
  • Janneke Krooneman and
  • Gerrit Jan Willem Euverink

14 September 2020

Many articles have been published on scale-down concepts as well as additive manufacturing techniques. However, information is scarce when miniaturization and 3D printing are applied in the fabrication of bioreactor systems. Therefore, garnering info...

  • Article
  • Open Access
8 Citations
5,308 Views
15 Pages

Low Cost AIP Design in 5G Flexible Antenna Phase Array System Application

  • Wei-Shin Tung,
  • Wei-Yuan Chiang,
  • Chih-Kai Liu,
  • Chiung-An Chen,
  • Pei-Zong Rao,
  • Patricia Angela R. Abu,
  • Wan-Ming Chen,
  • Faisal Asadi and
  • Shih-Lun Chen

13 September 2020

In this paper, a low cost 28 GHz Antenna-in-Package (AIP) for a 5G communication system is designed and investigated. The antenna is implemented on a low-cost FR4 substrate with a phase shift control integrated circuit, AnokiWave phasor integrated ci...

  • Article
  • Open Access
10 Citations
3,867 Views
11 Pages

13 September 2020

The optimal structure and process for the feedback field-effect transistor (FBFET) to operate as a logic device are investigated by using a technology computer-aided design mixed-mode simulator. To minimize the memory window of the FBFET, the channel...

  • Article
  • Open Access
4 Citations
4,773 Views
13 Pages

Second Harmonic Generation from Phase-Engineered Metasurfaces of Nanoprisms

  • Kanta Mochizuki,
  • Mako Sugiura,
  • Hirofumi Yogo,
  • Stefan Lundgaard,
  • Jingwen Hu,
  • Soon Hock Ng,
  • Yoshiaki Nishijima,
  • Saulius Juodkazis and
  • Atsushi Sugita

12 September 2020

Metasurfaces of gold (Au) nanoparticles on a SiO2-Si substrate were fabricated for the enhancement of second harmonic generation (SHG) using electron beam lithography and lift-off. Triangular Au nanoprisms which are non-centro-symmetric and support s...

  • Feature Paper
  • Review
  • Open Access
60 Citations
16,045 Views
25 Pages

Immune Organs and Immune Cells on a Chip: An Overview of Biomedical Applications

  • Margaretha A. J. Morsink,
  • Niels G. A. Willemen,
  • Jeroen Leijten,
  • Ruchi Bansal and
  • Su Ryon Shin

12 September 2020

Understanding the immune system is of great importance for the development of drugs and the design of medical implants. Traditionally, two-dimensional static cultures have been used to investigate the immune system in vitro, while animal models have...

  • Article
  • Open Access
33 Citations
4,410 Views
16 Pages

Enhancing Corrosion and Wear Resistance of Ti6Al4V Alloy Using CNTs Mixed Electro-Discharge Process

  • Gurpreet Singh,
  • Timur Rizovich Ablyaz,
  • Evgeny Sergeevich Shlykov,
  • Karim Ravilevich Muratov,
  • Amandeep Singh Bhui and
  • Sarabjeet Singh Sidhu

12 September 2020

This paper presents wear and corrosion resistance analysis of carbon nanotubes coated with Ti-6Al-4V alloy processed by electro-discharge treatment. The reported work is carried out using Taguchi’s L18 orthogonal array to design the experimenta...

  • Feature Paper
  • Article
  • Open Access
12 Citations
5,637 Views
14 Pages

11 September 2020

Integration of microfabricated, single-cell resolution and traditional, population-level biological assays will be the future of modern techniques in biology that will enroll in the evolution of biology into a precision scientific discipline. In this...

  • Article
  • Open Access
35 Citations
5,815 Views
15 Pages

Investigating Commercial Filaments for 3D Printing of Stiff and Elastic Constructs with Ligament-Like Mechanics

  • Audrey A. Pitaru,
  • Jean-Gabriel Lacombe,
  • Megan E. Cooke,
  • Lorne Beckman,
  • Thomas Steffen,
  • Michael H. Weber,
  • Paul A. Martineau and
  • Derek H. Rosenzweig

11 September 2020

The current gold standard technique for treatment of anterior cruciate ligament (ACL) injury is reconstruction with autograft. These treatments have a relatively high failure and re-tear rate. To overcome this, tissue engineering and additive manufac...

  • Review
  • Open Access
240 Citations
23,703 Views
43 Pages

Flexible Antennas: A Review

  • Sharadindu Gopal Kirtania,
  • Alan Wesley Elger,
  • Md. Rabiul Hasan,
  • Anna Wisniewska,
  • Karthik Sekhar,
  • Tutku Karacolak and
  • Praveen Kumar Sekhar

11 September 2020

The field of flexible antennas is witnessing an exponential growth due to the demand for wearable devices, Internet of Things (IoT) framework, point of care devices, personalized medicine platform, 5G technology, wireless sensor networks, and communi...

  • Communication
  • Open Access
4 Citations
3,803 Views
10 Pages

Modeling a Microtubule Filaments Mesh Structure from Confocal Microscopy Imaging

  • Yutaka Ueno,
  • Kento Matsuda,
  • Kaoru Katoh,
  • Akinori Kuzuya,
  • Akira Kakugo and
  • Akihiko Konagaya

10 September 2020

This study introduces a modeling method for a supermolecular structure of microtubules for the development of a force generation material using motor proteins. 3D imaging by confocal laser scanning microscopy (CLSM) was used to obtain 3D volume densi...

  • Article
  • Open Access
25 Citations
5,661 Views
13 Pages

Inkjet Printing on a New Flexible Ceramic Substrate for Internet of Things (IoT) Applications

  • Sharadindu Gopal Kirtania,
  • Manjurul Ahsan Riheen,
  • Sun Ung Kim,
  • Karthik Sekhar,
  • Anna Wisniewska and
  • Praveen Kumar Sekhar

8 September 2020

In this article, the optimization of printing properties on a new, flexible ceramic substrate is reported for sensing and antenna applications encompassing internet of things (IoT) devices. E-Strate® is a commercially available, non-rigid, thin c...

  • Review
  • Open Access
17 Citations
5,024 Views
24 Pages

8 September 2020

With the aim to take advantage from the existing technologies in microelectronics, photodetectors should be realized with materials compatible with them ensuring, at the same time, good performance. Although great efforts are made to search for new m...

  • Article
  • Open Access
24 Citations
5,812 Views
14 Pages

8 September 2020

After the development of 3D printing, the post-processing of the 3D-printed materials has been continuously studied, and with the recent expansion of the application of 3D printing, interest in it is increasing. Among various surface-machining proces...

  • Review
  • Open Access
27 Citations
6,931 Views
20 Pages

7 September 2020

It is of great importance for pipeline systems to be is efficient, cost-effective and safe during the transportation of the liquids and gases. However, underground pipelines often experience leaks due to corrosion, human destruction or theft, long-te...

  • Article
  • Open Access
9 Citations
3,833 Views
15 Pages

7 September 2020

Studies on cell separation with inertial microfluidics are often carried out with solid particles initially. When this condition is applied for actual cell separations, the efficiency typically becomes lower because of the polydispersity and deformab...

  • Article
  • Open Access
3 Citations
4,471 Views
14 Pages

3 September 2020

Integrated 2D spiral inductors possess low inductance per unit area, which limits their application range. However, the state of investigation into the lumped-element parameter extraction method for integrated 3D in-chip multi-turn solenoid inductors...

  • Article
  • Open Access
2 Citations
3,223 Views
22 Pages

Error Analysis of a Spherical Capacitive Sensor for the Micro-Clearance Detection in Spherical Joints

  • Wen Wang,
  • Wenjun Qiu,
  • He Yang,
  • Keqing Lu,
  • Zhanfeng Chen and
  • Bingfeng Ju

3 September 2020

Spherical joints have attracted increasing interest in the engineering applications of machine tools, industrial robots, medical equipment, and so on. As one of the promising methods of detecting the micro-clearance in spherical joints, the measureme...

  • Article
  • Open Access
5 Citations
3,292 Views
24 Pages

Investigating the Association between Motor Function, Neuroinflammation, and Recording Metrics in the Performance of Intracortical Microelectrode Implanted in Motor Cortex

  • Evon S. Ereifej,
  • Youjun Li,
  • Monika Goss-Varley,
  • Youjoung Kim,
  • Seth M. Meade,
  • Keying Chen,
  • Jacob Rayyan,
  • He Feng,
  • Keith Dona and
  • Jiayang Sun
  • + 3 authors

3 September 2020

Long-term reliability of intracortical microelectrodes remains a challenge for increased acceptance and deployment. There are conflicting reports comparing measurements associated with recording quality with postmortem histology, in attempts to bette...

  • Article
  • Open Access
12 Citations
2,914 Views
13 Pages

Simulation of the Slip Velocity Effect in an AC Electrothermal Micropump

  • Fraj Echouchene,
  • Thamraa Al-shahrani and
  • Hafedh Belmabrouk

31 August 2020

The principal aim of this study was to analyze the effect of slip velocity at the microchannel wall on an alternating current electrothermal (ACET) flow micropump fitted with several pairs of electrodes. Using the finite element method (FEM), the cou...

  • Article
  • Open Access
4 Citations
2,699 Views
11 Pages

31 August 2020

It is essential to control concentration gradients at specific locations for many biochemical experiments. This paper proposes a tunable concentration gradient generator actuated by acoustically oscillating bubbles trapped in the bubble channels usin...

  • Article
  • Open Access
5 Citations
3,840 Views
12 Pages

3D AND-Type Stacked Array for Neuromorphic Systems

  • Taejin Jang,
  • Suhyeon Kim,
  • Jeesoo Chang,
  • Kyung Kyu Min,
  • Sungmin Hwang,
  • Kyungchul Park,
  • Jong-Ho Lee and
  • Byung-Gook Park

31 August 2020

NOR/AND flash memory was studied in neuromorphic systems to perform vector-by-matrix multiplication (VMM) by summing the current. Because the size of NOR/AND cells exceeds those of other memristor synaptic devices, we proposed a 3D AND-type stacked a...

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Micromachines - ISSN 2072-666X