- Article
Thermal Reflow Simulation for PMMA Structures with Nonuniform Viscosity Profile
- Fedor Sidorov and
- Alexander Rogozhin
This paper presents a new approach to the simulation of the thermal reflow of e-beam-exposed polymethyl methacrylate (PMMA) taking into account its nonuniform viscosity profile. This approach is based on numerical “soapfilm” modeling of t...