An Investigation on the Most Likely Failure Locations in the BEoL Stack of a 20 nm Chip Due to Chip Package Interaction with the Use of Novel Semi-Elliptical Cracks
Abstract
:1. Introduction
2. Modeling of BEoL Stack
2.1. Details of the BEoL Stack of the 20 nm Chip
2.2. “Global-Local”Finite-Element Models
2.2.1. Effective Mechanical Properties of the BEoL Stack
2.2.2. Effect of the Width of the Cu Interconnects and the Number of Layers of BEoL Stack on the Equivalent Elastic Modulus
2.2.3. Thermal Stress in BEoL Stack during Solder Reflow
3. Study on the Most Likely Failure Location of BEoL Stack
3.1. Competitive Failure of Cracks along Different Interfaces
3.2. Variation of ERR along the Semi-Elliptical Crack Front
3.3. Variation of ERR with Metal Layer Number
3.4. Competitive Failure between Interfacial Cracks and Cracks in the Low-k ILD
4. Experimental Study on Failure of BEoL Stack
4.1. Experimental Procedure
4.2. Experimental Results
5. Conclusions
- (1)
- The microbumps furthest from the center of the chip have the greatest stress, and accordingly the largest PCB warpage.
- (2)
- The crack ERR of the low-k/Ta interfaces are higher than that for cracks within the low-k material.
- (3)
- Interfacial cracks in the M9 layer in the BEoL structure have the largest ERR among all layers and are hence more likely to propagate.
- (4)
- The interfacial crack at the bottom of the interconnect is more likely to propagate than that at the sidewalls of the interconnect.
- (5)
- The thermal shock experiments demonstrated that the dominant failure mode is the delamination in the second outer layer of the metal layer in the manner of Ta/low-k interfacial cracking at the bottom.
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
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Component | Dimensions (h = Height, D = Diameter) |
---|---|
Si | 6.8 mm × 6.8 mm × 150 μm |
PCB | 15 mm × 15 mm × 190 μm |
SAC | D = 30 μm, h = 5 μm |
Copper pillar | D = 30 μm, h = 20 μm |
Cu Pad | D = 30 μm, h = 10 μm |
BEoL layer | h = 8.2 μm |
Al Pad | D = 20 μm, h = 3 μm |
PI layer | D = 25 μm, h = 4 μm |
Underfill | 7 mm × 7 mm × 59 μm |
passivation | h = 4 μm |
Material | Elastic Moudulus(GPa) | Poisson’s Ratio | Themal Expansion Coefficient (ppm) |
---|---|---|---|
Cu | 130 | 0.35 | 17.4 |
Ta | 195 | 0.3 | 6.5 |
Low-k | 10.6 | 0.3 | 15 |
Underfill | 14.5 | 0.34 | α1/α2:25/110; Tg = 135 °C |
SiN | 200 | 0.27 | 3 |
Passivation | 211 | 0.27 | 3.2 |
Si | 129 | 0.28 | 2.9 |
Al | 74 | 0.33 | 21.5 |
PI | 3.5 | 0.34 | 35 |
SAC | 43 | 0.3 | 21.3 + 0.0175T (°C) |
Material | Pitch (nm) | Width (nm) | Thickness (nm) | Barrier Thickness (nm) | Etched Layer Thickness (nm) |
---|---|---|---|---|---|
Metal 1 | 200 | 800 | 400 | 30 | 40 |
Metal 2 | 200 | 800 | 400 | 30 | 40 |
Metal 3 | 200 | 800 | 400 | 30 | 40 |
Metal 4 | 300 | 850 | 500 | 40 | 45 |
Metal 5 | 300 | 850 | 500 | 40 | 45 |
Metal 6 | 300 | 850 | 500 | 40 | 45 |
Metal 7 | 500 | 900 | 600 | 50 | 60 |
Metal 8 | 500 | 900 | 600 | 50 | 60 |
Metal 9 | 500 | 900 | 600 | 50 | 60 |
Metal 10 | 700 | 1050 | 700 | 60 | 60 |
Si | 750 |
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Li, G.; Shi, Y.; Tay, A.A.O.; Long, Z. An Investigation on the Most Likely Failure Locations in the BEoL Stack of a 20 nm Chip Due to Chip Package Interaction with the Use of Novel Semi-Elliptical Cracks. Micromachines 2023, 14, 1953. https://doi.org/10.3390/mi14101953
Li G, Shi Y, Tay AAO, Long Z. An Investigation on the Most Likely Failure Locations in the BEoL Stack of a 20 nm Chip Due to Chip Package Interaction with the Use of Novel Semi-Elliptical Cracks. Micromachines. 2023; 14(10):1953. https://doi.org/10.3390/mi14101953
Chicago/Turabian StyleLi, Ganglong, Yidian Shi, Andrew A. O. Tay, and Zhilin Long. 2023. "An Investigation on the Most Likely Failure Locations in the BEoL Stack of a 20 nm Chip Due to Chip Package Interaction with the Use of Novel Semi-Elliptical Cracks" Micromachines 14, no. 10: 1953. https://doi.org/10.3390/mi14101953
APA StyleLi, G., Shi, Y., Tay, A. A. O., & Long, Z. (2023). An Investigation on the Most Likely Failure Locations in the BEoL Stack of a 20 nm Chip Due to Chip Package Interaction with the Use of Novel Semi-Elliptical Cracks. Micromachines, 14(10), 1953. https://doi.org/10.3390/mi14101953