23 Results Found

New mobile devices need microphones with a small size, low noise level, reduced cost and high stability respect to variations of temperature and humidity. These characteristics can be obtained using Microelectromechanical Systems (MEMS) microphones,...

Audio applications such as mobile phones, hearing aids, true wireless stereo earphones, and Internet of Things devices demand small size, high performance, and reduced cost. Microelectromechanical system (MEMS) capacitive microphones fulfill these re...

We present a physics-based system-level model for optimizing a novel comb-based capacitive MEMS microphone towards high signal-to-noise ratios. The model includes non-linear coupling effects between the electrodes as well as the physical dependencies...

This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are...

Different microstructures significantly affect the acoustic performance of MEMS capacitive microphones, particularly in key specifications of interest. This paper presents several microstructures, including rib-reinforced backplates, suspended diaphr...

In this paper, we proposed a MEMS capacitive microphone with a dual-anchored membrane. The proposed dual anchor could minimize the deviation of operating characteristics of the membrane according to the fabrication process variation. The membrane is...

The development of microelectromechanical system (MEMS) processes enables the integration of capacitive sensors into silicon integrated circuits. These sensors have been gaining considerable attention as a solution for mobile and internet of things (...

This paper presents a comprehensive investigation of sensitivity-determining factors in dual-backplate capacitive MEMS microphones through analytical modeling, finite element analysis (FEM), and experimental validation. The study focuses on three cri...

The MEMS microphone is a representative device among the MEMS family, which has attracted substantial research interest, and those tailored for human voice have earned distinct success in commercialization. Although sustained development persists, ch...

Currently, the most advanced micromachined microphones on the market are based on a capacitive coupling principle. Capacitive micro-electromechanical-system-based (MEMS) microphones resemble their millimetric counterparts, both in function and in per...

Capacitive-type transduction is now widely used in MEMS microphones. However, its sensitivity decreases with reducing size, due to decreasing air gap capacitance. In the present study, we proposed and developed the Electret Gate of Field Effect Trans...

Miniaturized capacitive microphones often show sensitivity degradation in the low-frequency region due to electrical and acoustical time constants. For low-frequency sound detection, conventional systems use a microphone with a large diaphragm and a...

There is a worldwide need to improve blood pressure (BP) measurement error in order to correctly diagnose hypertension. Cardiovascular diseases cause 17.9 million deaths annually and are a substantial monetary strain on healthcare. The current measur...

Microelectromechanical systems (MEMS) microphone sensors have significantly improved in the past years, while the readout electronic is mainly implemented using switched-capacitor technology. The development of new battery powered “always-on&rd...

A design of an on-chip ac-coupling preamplifier for mobile applications is presented. A microphone preamplifier should have a large input impedance to mitigate the effective-gain reduction caused by the microphone’s non-zero output impedance. From a...

An enhanced MEMS capacitive sensor is developed for photoacoustic gas detection. This work attempts to address the lack of the literature regarding integrated and compact silicon-based photoacoustic gas sensors. The proposed mechanical resonator comb...

Carbon nanotubes (CNTs) have long been at the forefront of materials research, with applications ranging from composites for increased tensile strength in construction and sports equipment to transistor switches and solar cell electrodes in energy ap...

High-performance medical acoustic sensors are essential in medical equipment and diagnosis. Commercially available medical acoustic sensors are capacitive and piezoelectric types. When they are used to detect heart sound signals, there is attenuation...

This paper presents a new procedure for the real-time processing and analysis of data from thermoacoustic systems. The approach focuses on continuously acquiring and adjusting measurements of acoustic wave pressure, enabling the instantaneous estimat...

In audio transduction applications, virtualization can be defined as the task of digitally altering the acoustic behavior of an audio sensor or actuator with the aim of mimicking that of a target transducer. Recently, a digital signal preprocessing m...

Multilayer Ceramic Capacitors (MLCC) have a major role in modern electronic devices due to their small price and size, large range of capacitance, small ESL and ESR, and good frequency response. Unfortunately, the main dielectric material used for ML...

Power-quality events and operation transients in power systems (PS) with isolated neutral can saturate inductive voltage transformers (IVT), which, when interacting with the overhead and underground cable capacitances, can cause ferroresonance events...

MEMS acoustic sensors are a type of physical quantity sensor based on MEMS manufacturing technology for detecting sound waves. They utilize various sensitive structures such as thin films, cantilever beams, or cilia to collect acoustic energy, and us...