Sensors, Volume 25, Issue 24
2025 December-2 - 289 articles
Cover Story: Photoacoustic spectroscopy promises compact, selective gas sensors, but its full potential in non-resonant configurations is limited by the poor low-frequency sensitivity of conventional MEMS microphones. Our work introduces a thermal MEMS fluidic microphone overcoming this bottleneck, achieving constant sensitivity of 32 µV/Pa below 20 Hz. The sensor converts the photoacoustic pressure into oscillatory flow through on-chip perforations, modulating heat transfer between a microheater and thermopile. We develop a comprehensive analytical model and validate it experimentally using a non-resonant CO2 photoacoustic cell, demonstrating a detection limit of 4 ppm over 1 seconds. This approach offers robust, scalable solutions for compact gas sensing in environmental monitoring, automotive emissions, and industrial safety applications. View this paper - Issues are regarded as officially published after their release is announced to the table of contents alert mailing list .
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