- Communication
Sidewall Modification Process for Trench Silicon Power Devices
- Lei Jin,
- Zhuorui Tang,
- Long Chen,
- Guijiu Xie,
- Zhanglong Chen,
- Wei Wei,
- Jianghua Fan,
- Xiaoliang Gong and
- Ming Zhang
In this study, trench sidewall modification processes were designed to improve profile uniformity and thereby enhance the electrical performance of silicon power devices in large-scale production. The effects of trench sidewall modification on the mo...