- Review
Direct Wafer Bonding and Its Application to Waveguide Optical Isolators
- Tetsuya Mizumoto,
- Yuya Shoji and
- Ryohei Takei
This paper reviews the direct bonding technique focusing on the waveguide optical isolator application. A surface activated direct bonding technique is a powerful tool to realize a tight contact between dissimilar materials. This technique has the po...