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Open AccessArticle

Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor

Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing 100044, China
Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, Shanghai 201203, China
Department of Instrument Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
College of Mechanical and Electronic Engineering, Shandong University of Science and Technology, Qingdao 266590, China
Authors to whom correspondence should be addressed.
Sensors 2019, 19(19), 4346;
Received: 19 August 2019 / Revised: 25 September 2019 / Accepted: 3 October 2019 / Published: 8 October 2019
(This article belongs to the Special Issue Nanomechanical Sensors)
This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the junction. The buffer-associated optical losses were examined for different cantilever thicknesses. The optimum length of the buffer was found to be 0.97 μm for a cantilever thickness of 300 nm. With this configuration, the optical loss was reduced to about 40%, and the maximum sensitivity was more than twice that of the conventional structure. View Full-Text
Keywords: optical waveguide cantilever sensor; buffer; sensitivity optical waveguide cantilever sensor; buffer; sensitivity
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Jing, Y.; Fan, G.; Wang, R.; Zhang, Z.; Cai, X.; Wei, J.; Chen, X.; Li, H.; Li, Y. Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor. Sensors 2019, 19, 4346.

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