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Open AccessArticle

Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor

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Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijing Jiaotong University, Beijing 100044, China
2
Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, Shanghai 201203, China
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Department of Instrument Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
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College of Mechanical and Electronic Engineering, Shandong University of Science and Technology, Qingdao 266590, China
*
Authors to whom correspondence should be addressed.
Sensors 2019, 19(19), 4346; https://doi.org/10.3390/s19194346
Received: 19 August 2019 / Revised: 25 September 2019 / Accepted: 3 October 2019 / Published: 8 October 2019
(This article belongs to the Special Issue Nanomechanical Sensors)
This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the junction. The buffer-associated optical losses were examined for different cantilever thicknesses. The optimum length of the buffer was found to be 0.97 μm for a cantilever thickness of 300 nm. With this configuration, the optical loss was reduced to about 40%, and the maximum sensitivity was more than twice that of the conventional structure. View Full-Text
Keywords: optical waveguide cantilever sensor; buffer; sensitivity optical waveguide cantilever sensor; buffer; sensitivity
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MDPI and ACS Style

Jing, Y.; Fan, G.; Wang, R.; Zhang, Z.; Cai, X.; Wei, J.; Chen, X.; Li, H.; Li, Y. Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor. Sensors 2019, 19, 4346.

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