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Micromachines 2016, 7(2), 18;

Devices Based on Co-Integrated MEMS Actuators and Optical Waveguide: A Review

FEMTO-ST Institute, Université Bourgogne Franche-Comté, CNRS UMR 6174, 15B Avenue des Montboucons, 25030 Besançon cedex, France
Academic Editor: Stefano Mariani
Received: 2 November 2015 / Revised: 17 January 2016 / Accepted: 18 January 2016 / Published: 25 January 2016
(This article belongs to the Special Issue Optical Microsystems)
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The convergence of Micro Electro Mechanical Systems (MEMS) and optics was, at the end of the last century, a fertile ground for a new breed of technological and scientific achievements. The weightlessness of light has been identified very early as a key advantage for micro-actuator application, giving rise to optical free-space MEMS devices. In parallel to these developments, the past 20 years saw the emergence of a less pursued approach relying on guided optical wave, where, pushed by the similarities in fabrication process, researchers explored the possibilities offered by merging integrated optics and MEMS technology. The interest of using guided waves is well known (absence of diffraction, tight light confinement, small size, compatibility with fiber optics) but it was less clear how they could be harnessed with MEMS technology. Actually, it is possible to use MEMS actuators for modifying waveguide properties (length, direction, index of refraction) or for coupling light between waveguide, enabling many new devices for optical telecommunication, astronomy or sensing. With the recent expansion to nanophotonics and optomechanics, it seems that this field still holds a lot of promises. View Full-Text
Keywords: co-integration; MEMS; actuator; integrated optics; waveguide co-integration; MEMS; actuator; integrated optics; waveguide

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Chollet, F. Devices Based on Co-Integrated MEMS Actuators and Optical Waveguide: A Review. Micromachines 2016, 7, 18.

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