- Article
Growth of NbC Thin Film Using CH4 as a Carbon Source and Reducing Agent
- Kwan-Woo Kim,
- Bum Jun Kim,
- Sang Hoon Lee,
- Tuqeer Nasir,
- Hyung Kyu Lim,
- Ik Jun Choi,
- Byung Joo Jeong,
- Jaeyeong Lee,
- Hak Ki Yu and
- Jae-Young Choi
Transition metal carbides (TMCs) have high melting points, hardness, and chemical stabilities in acidic media. In this work, a chemical vapor deposition method using CH4 as a carbon source and reducing agent was employed to make an NbC film. NbCl5 ca...