- Review
Unseeded Crystal Growth of (100)-Oriented Grain-Boundary-Free Si Thin-Film by a Single Scan of the CW-Laser Lateral Crystallization of a-Si on Insulator
- Nobuo Sasaki,
- Muhammad Arif,
- Yukiharu Uraoka,
- Jun Gotoh and
- Shigeto Sugimoto
Laser crystallization of a-Si film on insulating substrate is a promising technology to fabricate three-dimensional integrations (3D ICs), flat panel displays (FPDs), or flexible electronics, because the crystallization can be performed on room tempe...