- Article
The Fringe-Capacitance of Etching Holes for CMOS-MEMS
- Yi-Ta Wang,
- Yuh-Chung Hu,
- Wen-Chang Chu and
- Pei-Zen Chang
Movable suspended microstructures are the common feature of sensors or devices in the fields of Complementary-Metal-Oxide-Semiconductors and Micro-Electro-Mechanical Systems which are usually abbreviated as CMOS-MEMS. To suspend the microstructures,...