Absolute Position Sensing Based on a Robust Differential Capacitive Sensor with a Grounded Shield Window

Bai, Yang; Lu, Yunfeng; Hu, Pengcheng; Wang, Gang; Xu, Jinxin; Zeng, Tao; Li, Zhengkun; Zhang, Zhonghua; Tan, Jiubin

doi:10.3390/s16050680

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Absolute Position Sensing Based on a Robust Differential Capacitive Sensor with a Grounded Shield Window

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School of Electrical Engineering and Automation, Harbin Institute of Technology, Harbin 150080, China

National Institute of Metrology, Beijing 100013, China

Key Laboratory for the Electrical Quantum Standard of AQSIQ, Beijing 100029, China

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School of Instrumentation Science and Opto-Electronics Engineering, Beihang University, Beijing 100191, China

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Department of Electrical Engineering, Tsinghua University, Beijing 100084, China

Author to whom correspondence should be addressed.

Academic Editor: Vamsy P. Chodavarapu

Sensors 2016, 16(5), 680; https://doi.org/10.3390/s16050680

Received: 20 February 2016 / Revised: 16 April 2016 / Accepted: 9 May 2016 / Published: 11 May 2016

(This article belongs to the Section Physical Sensors)

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Abstract

A simple differential capacitive sensor is provided in this paper to measure the absolute positions of length measuring systems. By utilizing a shield window inside the differential capacitor, the measurement range and linearity range of the sensor can reach several millimeters. What is more interesting is that this differential capacitive sensor is only sensitive to one translational degree of freedom (DOF) movement, and immune to the vibration along the other two translational DOFs. In the experiment, we used a novel circuit based on an AC capacitance bridge to directly measure the differential capacitance value. The experimental result shows that this differential capacitive sensor has a sensitivity of 2 × 10⁻⁴ pF/μm with 0.08 μm resolution. The measurement range of this differential capacitive sensor is 6 mm, and the linearity error are less than 0.01% over the whole absolute position measurement range. View Full-Text

Keywords: capacitive sensor; length metrology; fringe effect

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MDPI and ACS Style

Bai, Y.; Lu, Y.; Hu, P.; Wang, G.; Xu, J.; Zeng, T.; Li, Z.; Zhang, Z.; Tan, J. Absolute Position Sensing Based on a Robust Differential Capacitive Sensor with a Grounded Shield Window. Sensors 2016, 16, 680. https://doi.org/10.3390/s16050680

AMA Style

Bai Y, Lu Y, Hu P, Wang G, Xu J, Zeng T, Li Z, Zhang Z, Tan J. Absolute Position Sensing Based on a Robust Differential Capacitive Sensor with a Grounded Shield Window. Sensors. 2016; 16(5):680. https://doi.org/10.3390/s16050680

Chicago/Turabian Style

Bai, Yang, Yunfeng Lu, Pengcheng Hu, Gang Wang, Jinxin Xu, Tao Zeng, Zhengkun Li, Zhonghua Zhang, and Jiubin Tan. 2016. "Absolute Position Sensing Based on a Robust Differential Capacitive Sensor with a Grounded Shield Window" Sensors 16, no. 5: 680. https://doi.org/10.3390/s16050680

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Absolute Position Sensing Based on a Robust Differential Capacitive Sensor with a Grounded Shield Window

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