- Abstract
Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS Switches
- Anna Persano,
- Girolamo Tagliapietra,
- Jacopo Iannacci,
- Alvise Bagolini,
- Fabio Quaranta and
- Pietro Siciliano
Electrostatically actuated microelectromechanical system (MEMS) switches with fixed- fixed beams were fabricated. FEM modeling was used to calculate the contributions of stress in the fabricated beams from the measured values of pull-in voltage. The...