- Article
Thermal Flow Meter with Integrated Thermal Conductivity Sensor
- Shirin Azadi Kenari,
- Remco J. Wiegerink,
- Henk-Willem Veltkamp,
- Remco G. P. Sanders and
- Joost C. Lötters
This paper presents a novel gas-independent thermal flow sensor chip featuring three calorimetric flow sensors for measuring flow profile and direction within a tube, along with a single-wire flow independent thermal conductivity sensor capable of id...