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Micromachines, Volume 13, Issue 1

2022 January - 143 articles

Cover Story: The main problem existing in XYZ platforms is the mismatch between platform size and stroke. Furthermore, most of them cannot generate positive and negative bi-directional movement relative to the origin. To solve these problems, a 3DOF XYZ bi-directional platform using reverse arrangements of Z-shaped flexure hinges on the X-axis and Y-axis is presented in this paper. View this paper
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Articles (143)

  • Article
  • Open Access
16 Citations
3,400 Views
10 Pages

A MEMS-Based Co-Oscillating Electrochemical Vector Hydrophone

  • Anxiang Zhong,
  • Mingwei Chen,
  • Yulan Lu,
  • Jian Chen,
  • Deyong Chen and
  • Junbo Wang

17 January 2022

Aiming at the development needs of low-frequency and high-sensitivity vector hydrophones, this paper has developed a micro-electro-mechanical system (MEMS) based co-oscillating electrochemical vector hydrophone. We obtained the optimized geometric pa...

  • Article
  • Open Access
11 Citations
3,776 Views
11 Pages

17 January 2022

The cyclic stress evolution induced by repeated volume variation causes mechanical degradation and damage to electrodes, resulting in reduced performance and lifetime of LIBs. To probe the electro-chemo-mechanical coupled degradation, we conducted in...

  • Article
  • Open Access
4 Citations
3,140 Views
12 Pages

17 January 2022

The monitoring of dissolved oxygen is a key parameter in many fields, namely the treatment and monitoring of various cerebral traumas. Leveraging existing manufacturing techniques, electrochemical sensors hold the potential for compact, simple, and s...

  • Review
  • Open Access
47 Citations
12,438 Views
16 Pages

A Review on Manufacturing and Post-Processing Technology of Vascular Stents

  • Wei Jiang,
  • Wenxiang Zhao,
  • Tianfeng Zhou,
  • Liang Wang and
  • Tianyang Qiu

16 January 2022

Percutaneous coronary intervention (PCI) with stent implantation is one of the most effective treatments for cardiovascular diseases (CVDs). However, there are still many complications after stent implantation. As a medical device with a complex stru...

  • Review
  • Open Access
16 Citations
5,247 Views
18 Pages

Microfluidic Approaches and Methods Enabling Extracellular Vesicle Isolation for Cancer Diagnostics

  • Premanshu Kumar Singh,
  • Aarti Patel,
  • Anastasia Kaffenes,
  • Catherine Hord,
  • Delaney Kesterson and
  • Shaurya Prakash

16 January 2022

Advances in cancer research over the past half-century have clearly determined the molecular origins of the disease. Central to the use of molecular signatures for continued progress, including rapid, reliable, and early diagnosis is the use of bioma...

  • Article
  • Open Access
72 Citations
6,411 Views
16 Pages

15 January 2022

Wire arc additive manufacturing (WAAM) is capable of rapidly depositing metal materials thus facilitating the fabrication of large-shape metal components. However, due to the multi-process-variability in the WAAM process, the deposited shape (bead wi...

  • Article
  • Open Access
14 Citations
2,789 Views
11 Pages

Minimized Triple-Band Eight-Element Antenna Array for 5G Metal-frame Smartphone Applications

  • Jianlin Huang,
  • Zhuoni Chen,
  • Qibo Cai,
  • Tian Hong Loh and
  • Gui Liu

15 January 2022

A multiple-input-multiple-output (MIMO) antenna array for triple-band 5G metal-frame smartphone applications is proposed in this paper. Each single antenna element consists of an S-shaped feeding strip and an L-shaped radiation strip on the metal fra...

  • Article
  • Open Access
10 Citations
4,311 Views
11 Pages

A Novel Bidirectional AlGaN/GaN ESD Protection Diode

  • Bin Yao,
  • Yijun Shi,
  • Hongyue Wang,
  • Xinbin Xu,
  • Yiqiang Chen,
  • Zhiyuan He,
  • Qingzhong Xiao,
  • Lei Wang,
  • Guoguang Lu and
  • Bo Zhang
  • + 2 authors

15 January 2022

Despite the superior working properties, GaN-based HEMTs and systems are still confronted with the threat of a transient ESD event, especially for the vulnerable gate structure of the p-GaN or MOS HEMTs. Therefore, there is still an urgent need for a...

  • Article
  • Open Access
7 Citations
4,017 Views
9 Pages

Thermodynamic Modeling of Solvent-Assisted Lipid Bilayer Formation Process

  • Hongmei Xu,
  • Hyunhyuk Tae,
  • Nam-Joon Cho,
  • Changjin Huang and
  • K. Jimmy Hsia

15 January 2022

The solvent-assisted lipid bilayer (SALB) formation method provides a simple and efficient, microfluidic-based strategy to fabricate supported lipid bilayers (SLBs) with rich compositional diversity on a wide range of solid supports. While various st...

  • Article
  • Open Access
2,509 Views
11 Pages

15 January 2022

Energy harvesters are devices that accumulate ambient vibrational energy from the environment, and for the time being, variable capacitance is the most widely used mechanism. Various designs were proposed to increase the power of such devices, and in...

  • Feature Paper
  • Article
  • Open Access
10 Citations
4,961 Views
16 Pages

Perfusion System for Modification of Luminal Contents of Human Intestinal Organoids and Realtime Imaging Analysis of Microbial Populations

  • Nicholas J. Ginga,
  • Raleigh Slyman,
  • Ge-Ah Kim,
  • Eric Parigoris,
  • Sha Huang,
  • Veda K. Yadagiri,
  • Vincent B. Young,
  • Jason R. Spence and
  • Shuichi Takayama

14 January 2022

Intestinal organoids are 3D cell structures that replicate some aspects of organ function and are organized with a polarized epithelium facing a central lumen. To enable more applications, new technologies are needed to access the luminal cavity and...

  • Article
  • Open Access
18 Citations
5,516 Views
17 Pages

Evaluation and Optimization of a Cross-Rib Micro-Channel Heat Sink

  • Haiying Chen,
  • Chuan Chen,
  • Yunyan Zhou,
  • Chenglin Yang,
  • Gang Song,
  • Fengze Hou,
  • Binbin Jiao and
  • Ruiwen Liu

14 January 2022

This article presents a novel cross-rib micro-channel (MC-CR) heat sink to make fluid self-rotate. For a thermal test chip (TTC) with 100 w/cm2, the cross-ribs micro-channel were compared with the rectangular (MC-R) and horizontal rib micro-channel (...

  • Feature Paper
  • Article
  • Open Access
20 Citations
6,771 Views
20 Pages

14 January 2022

Compared with rigid robots, soft robots have better adaptability to the environment because of their pliability. However, due to the lower structural stiffness of the soft manipulator, the posture of the manipulator is usually decided by the weight a...

  • Article
  • Open Access
14 Citations
3,533 Views
9 Pages

Improvement of Crystal Quality of AlN Films with Different Polarities by Annealing at High Temperature

  • Yang Yue,
  • Maosong Sun,
  • Jie Chen,
  • Xuejun Yan,
  • Zhuokun He,
  • Jicai Zhang and
  • Wenhong Sun

14 January 2022

High-quality AlN film is a key factor affecting the performance of deep-ultraviolet optoelectronic devices. In this work, high-temperature annealing technology in a nitrogen atmosphere was used to improve the quality of AlN films with different polar...

  • Article
  • Open Access
14 Citations
3,822 Views
14 Pages

14 January 2022

In this study, highly active Fe3O4@PDA@Au@GO surface-enhanced Raman spectroscopy (SERS) active substrate was synthesized for application in the enrichment and detection of trace polycyclic aromatic hydrocarbons (PAHs) in the environment. The morpholo...

  • Article
  • Open Access
5 Citations
2,178 Views
17 Pages

14 January 2022

Advanced manufacturing processes require an in-line full inspection system. A nondestructive inspection system able to detect a contaminant such as tool chipping was utilized for the purpose of detecting a defective product as well as damaged machine...

  • Article
  • Open Access
21 Citations
3,034 Views
11 Pages

Pressure-Responsive Conductive Poly(vinyl alcohol) Composites Containing Waste Cotton Fibers Biochar

  • Mattia Bartoli,
  • Daniele Torsello,
  • Erik Piatti,
  • Mauro Giorcelli,
  • Amelia Carolina Sparavigna,
  • Massimo Rovere,
  • Gianluca Ghigo and
  • Alberto Tagliaferro

13 January 2022

The development of responsive composite materials is among the most interesting challenges in contemporary material science and technology. Nevertheless, the use of highly expensive nanostructured fillers has slowed down the spread of these smart mat...

  • Article
  • Open Access
24 Citations
3,540 Views
13 Pages

13 January 2022

The 6D Pose estimation is a crux in many applications, such as visual perception, autonomous navigation, and spacecraft motion. For robotic grasping, the cluttered and self-occlusion scenarios bring new challenges to the this field. Currently, societ...

  • Article
  • Open Access
2,892 Views
14 Pages

A Microfabricated Bandpass Filter with Coarse-Tuning and Fine-Tuning Ability Based on IPD Process and PCB Artwork

  • Junzhe Shen,
  • Tian Qiang,
  • Minjia Gao,
  • Yangchuan Ma,
  • Junge Liang and
  • Yanfeng Jiang

13 January 2022

In this paper, a bandpass filter (BPF) was developed utilizing GaAs-based integrated passive device technology which comprises an asymmetrical spiral inductor and an interleaved array capacitor, possessing two tuning modes: coarse-tuning and fine-tun...

  • Article
  • Open Access
5 Citations
2,600 Views
8 Pages

13 January 2022

Device guidelines for reducing power with punch-through current annealing in gate-all-around (GAA) FETs were investigated based on three-dimensional (3D) simulations. We studied and compared how different geometric dimensions and materials of GAA FET...

  • Article
  • Open Access
8 Citations
3,563 Views
10 Pages

A Novel Dye-Sensitized Solar Cell Structure Based on Metal Photoanode without FTO/ITO

  • Jianjun Yang,
  • Xiaobao Yu,
  • Yaxin Li,
  • Guilin Cheng,
  • Zichuan Yi,
  • Zhi Zhang,
  • Feng Chi and
  • Liming Liu

13 January 2022

Traditional dye-sensitized solar cells (DSSC) use FTO/ITO containing expensive rare elements as electrodes, which are difficult to meet the requirements of flexibility. A new type of flexible DSSC structure with all-metal electrodes without rare elem...

  • Article
  • Open Access
19 Citations
3,413 Views
12 Pages

12 January 2022

A circularly polarized implantable antenna integrated with a voltage-doubled rectifier (abbr., rectenna) is investigated for microwave wireless power transfer in the industrial, scientific, and medical (ISM) band of 2.4–2.48 GHz. The proposed a...

  • Article
  • Open Access
1 Citations
2,659 Views
9 Pages

Graphitisation of Waste Carbon Powder with Femtosecond Laser Annealing

  • Lucas Lum,
  • Chong-Wei Tan,
  • Chun Fei Siah,
  • Kun Liang and
  • Beng Kang Tay

12 January 2022

Graphitisation of structural characteristics and improvement in electrical conductivity was reported onto waste carbon powder through femtosecond laser annealing. Raman spectroscopy on the carbon powder pre- and post-annealing showed a shift from amo...

  • Review
  • Open Access
77 Citations
11,195 Views
29 Pages

Graphene as a Piezoresistive Material in Strain Sensing Applications

  • Farid Sayar Irani,
  • Ali Hosseinpour Shafaghi,
  • Melih Can Tasdelen,
  • Tugce Delipinar,
  • Ceyda Elcin Kaya,
  • Guney Guven Yapici and
  • Murat Kaya Yapici

12 January 2022

High accuracy measurement of mechanical strain is critical and broadly practiced in several application areas including structural health monitoring, industrial process control, manufacturing, avionics and the automotive industry, to name a few. Stra...

  • Article
  • Open Access
7 Citations
3,741 Views
14 Pages

Acoustic Performance Study of Fiber-Optic Acoustic Sensors Based on Fabry–Pérot Etalons with Different Q Factors

  • Jiamin Chen,
  • Chenyang Xue,
  • Yongqiu Zheng,
  • Jiandong Bai,
  • Xinyu Zhao,
  • Liyun Wu and
  • Yuan Han

12 January 2022

The ideal development direction of the fiber-optic acoustic sensor (FOAS) is toward broadband, a high sensitivity and a large dynamic range. In order to further promote the acoustic detection potential of the Fabry–Pérot etalon (FPE)-bas...

  • Article
  • Open Access
8 Citations
3,242 Views
13 Pages

12 January 2022

Cell separation has become @important in biological and medical applications. Dielectrophoresis (DEP) is widely used due to the advantages it offers, such as the lack of a requirement for biological markers and the fact that it involves no damage to...

  • Article
  • Open Access
49 Citations
3,663 Views
17 Pages

12 January 2022

In the present paper, an MHD three-dimensional non-Newtonian fluid flow over a porous stretching/shrinking sheet in the presence of mass transpiration and thermal radiation is examined. This problem mainly focusses on an analytical solution; graphene...

  • Article
  • Open Access
25 Citations
2,825 Views
11 Pages

11 January 2022

Owing to its ubiquity in natural water systems and the high toxicity of its accumulation in the human body, it is essential to develop simple and low-cost electrochemical sensors for the determination of 3,3′,5,5′-tetrabromobisphenol A (T...

  • Review
  • Open Access
33 Citations
8,832 Views
26 Pages

A Survey on Analog-to-Digital Converter Integrated Circuits for Miniaturized High Resolution Ultrasonic Imaging System

  • Dongdong Chen,
  • Xinhui Cui,
  • Qidong Zhang,
  • Di Li,
  • Wenyang Cheng,
  • Chunlong Fei and
  • Yintang Yang

11 January 2022

As traditional ultrasonic imaging systems (UIS) are expensive, bulky, and power-consuming, miniaturized and portable UIS have been developed and widely utilized in the biomedical field. The performance of integrated circuits (ICs) in portable UIS obv...

  • Article
  • Open Access
5 Citations
3,516 Views
11 Pages

Non-Cavitation Targeted Microbubble-Mediated Single-Cell Sonoporation

  • Xiufang Liu,
  • Wenjun Zhang,
  • Yanshu Jing,
  • Shasha Yi,
  • Umar Farooq,
  • Jingyao Shi,
  • Na Pang,
  • Ning Rong and
  • Lisheng Xu

11 January 2022

Sonoporation employs ultrasound accompanied by microbubble (MB) cavitation to induce the reversible disruption of cell membranes and has been exploited as a promising intracellular macromolecular delivery strategy. Due to the damage to cells resultin...

  • Feature Paper
  • Article
  • Open Access
7 Citations
4,823 Views
13 Pages

11 January 2022

We present a plasmonic-enhanced dielectrophoretic (DEP) phenomenon to improve optical DEP performance of a floating electrode optoelectronic tweezers (FEOET) device, where aqueous droplets can be effectively manipulated on a light-patterned photocond...

  • Article
  • Open Access
23 Citations
4,337 Views
20 Pages

11 January 2022

Interventional surgical robots are widely used in neurosurgery to improve surgeons’ working environment and surgical safety. Based on the actual operational needs of surgeons’ feedback during preliminary in vivo experiments, this paper pr...

  • Review
  • Open Access
71 Citations
12,902 Views
16 Pages

Underwater Soft Robotics: A Review of Bioinspiration in Design, Actuation, Modeling, and Control

  • Samuel M. Youssef,
  • MennaAllah Soliman,
  • Mahmood A. Saleh,
  • Mostafa A. Mousa,
  • Mahmoud Elsamanty and
  • Ahmed G. Radwan

10 January 2022

Nature and biological creatures are some of the main sources of inspiration for humans. Engineers have aspired to emulate these natural systems. As rigid systems become increasingly limited in their capabilities to perform complex tasks and adapt to...

  • Article
  • Open Access
3 Citations
2,049 Views
13 Pages

10 January 2022

Filling microstructures in the air with liquid or removing trapped gases from a surface in a liquid are required in processes such as cleaning, bonding, and painting. However, it is difficult to deform the gas–liquid interface to fill a small h...

  • Article
  • Open Access
2 Citations
3,679 Views
7 Pages

10 January 2022

Effects of carbon implantation (C-imp) on the contact characteristics of Ti/Ge contact were investigated. The C-imp into Ti/Ge system was developed to reduce severe Fermi-level pinning (FLP) and to improve the thermal stability of Ti/Ge contact. The...

  • Article
  • Open Access
12 Citations
3,056 Views
14 Pages

Experiments on Waste Heat Thermoelectric Generation for Passenger Vehicles

  • Jianfei Chen,
  • Wei Xie,
  • Min Dai,
  • Guorong Shen,
  • Guoneng Li and
  • Yuanjun Tang

10 January 2022

In order to utilize waste heat from passenger vehicles by a thermoelectric generator (TEG), a lab-scale TEG with a sufficient low-pressure drop was designed and tested. The waste heat from a 2.0 L petrol engine was simulated by using an air-circulati...

  • Article
  • Open Access
30 Citations
6,131 Views
15 Pages

Study of Self-Heating and High-Power Microwave Effects for Enhancement-Mode p-Gate GaN HEMT

  • Yingshuo Qin,
  • Changchun Chai,
  • Fuxing Li,
  • Qishuai Liang,
  • Han Wu and
  • Yintang Yang

9 January 2022

The self-heating and high-power microwave (HPM) effects that can cause device heating are serious reliability issues for gallium nitride (GaN) high-electron-mobility transistors (HEMT), but the specific mechanisms are disparate. The different impacts...

  • Article
  • Open Access
8 Citations
2,733 Views
14 Pages

Figure of Merit Enhancement of Laterally Vibrating RF-MEMS Resonators via Energy-Preserving Addendum Frame

  • Temesgen Bailie Workie,
  • Zhaohui Wu,
  • Panliang Tang,
  • Jingfu Bao and
  • Ken-ya Hashimoto

9 January 2022

This paper examines a new technique to improve the figure of merit of laterally vibrating RF-MEMS resonators through an energy-preserving suspended addendum frame structure using finite element analysis. The proposed suspended addendum frame on the s...

  • Feature Paper
  • Article
  • Open Access
8 Citations
5,180 Views
12 Pages

9 January 2022

The electrochemical label-free aptamer-based biosensors (also known as aptasensors) are highly suitable for point-of-care applications. The well-established C-MEMS (carbon microelectromechanical systems) platforms have distinguishing features which a...

  • Article
  • Open Access
22 Citations
3,764 Views
17 Pages

Comparison of the In Vitro and In Vivo Electrochemical Performance of Bionic Electrodes

  • Alexander R. Harris,
  • Carrie Newbold,
  • Dimitra Stathopoulos,
  • Paul Carter,
  • Robert Cowan and
  • Gordon G. Wallace

9 January 2022

The electrochemical performance of platinum electrodes was assessed in vitro and in vivo to determine the impact of electrode implantation and the relevance of in vitro testing in predicting in vivo behaviour. A significant change in electrochemical...

  • Article
  • Open Access
14 Citations
3,343 Views
8 Pages

Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator

  • Chao Gao,
  • Yang Zou,
  • Jie Zhou,
  • Yan Liu,
  • Wenjuan Liu,
  • Yao Cai and
  • Chengliang Sun

8 January 2022

As radio-frequency (RF) communication becomes more ubiquitous globally, film bulk acoustic resonators (FBAR) have attracted great attention for their superior performance. One of the key parameters of an FBAR, the effective electromechanical coupling...

  • Feature Paper
  • Article
  • Open Access
7 Citations
3,433 Views
21 Pages

8 January 2022

Based on expert system theory and fluid–structure interaction (FSI), this paper suggests an intelligent design optimization system to derive the optimal shape of both the fluid and solid domain of flow channels. A parametric modeling scheme of flow c...

  • Article
  • Open Access
3 Citations
2,785 Views
14 Pages

8 January 2022

This paper describes the non-contact optical detection of debris material that adheres to the substrates of color filters (CFs) and thin-film transistors (TFTs) by area charge-coupled devices (CCDs) and laser sensors. One of the optical detections is...

  • Article
  • Open Access
13 Citations
4,971 Views
17 Pages

Piezoelectric MEMS Acoustic Transducer with Electrically-Tunable Resonant Frequency

  • Alessandro Nastro,
  • Marco Ferrari,
  • Libor Rufer,
  • Skandar Basrour and
  • Vittorio Ferrari

8 January 2022

The paper presents a technique to obtain an electrically-tunable matching between the series and parallel resonant frequencies of a piezoelectric MEMS acoustic transducer to increase the effectiveness of acoustic emission/detection in voltage-mode dr...

  • Article
  • Open Access
16 Citations
6,447 Views
14 Pages

Fabrication of 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array through Silicon Wafer Bonding

  • Ziyuan Wang,
  • Changde He,
  • Wendong Zhang,
  • Yifan Li,
  • Pengfei Gao,
  • Yanan Meng,
  • Guojun Zhang,
  • Yuhua Yang,
  • Renxin Wang and
  • Sai Zhang
  • + 6 authors

8 January 2022

Capacitive micromachined ultrasound transducers (CMUTs) have broad application prospects in medical imaging, flow monitoring, and nondestructive testing. CMUT arrays are limited by their fabrication process, which seriously restricts their further de...

  • Article
  • Open Access
9 Citations
3,411 Views
14 Pages

8 January 2022

The article presents the results of the development and study of a combined circuitry (compact) model of thin metal oxide films based memristive elements, which makes it possible to simulate both bipolar switching processes and multilevel tuning of t...

  • Feature Paper
  • Article
  • Open Access
7 Citations
3,663 Views
11 Pages

8 January 2022

Silicon nanowire (SiNW) field-effect transistors (FETs) have been developed as very sensitive and label-free biomolecular sensors. The detection principle operating in a SiNW biosensor is indirect. The biomolecules are detected by measuring the chang...

  • Article
  • Open Access
33 Citations
4,468 Views
23 Pages

8 January 2022

Developments in applications such as rocket nozzles, miniature nuclear reactors and solar thermal generation pose high-density heat dissipation challenges. In these applications, a large amount heat must be removed in a limited space under high tempe...

  • Article
  • Open Access
2 Citations
1,850 Views
12 Pages

Fast Terahertz Imaging Model Based on Group Sparsity and Nonlocal Self-Similarity

  • Xiaozhen Ren,
  • Yanwen Bai,
  • Yingying Niu and
  • Yuying Jiang

8 January 2022

In order to solve the problems of long-term image acquisition time and massive data processing in a terahertz time domain spectroscopy imaging system, a novel fast terahertz imaging model, combined with group sparsity and nonlocal self-similarity (GS...

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Micromachines - ISSN 2072-666X