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Micromachines
Volume 13
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10.3390/mi13010143
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Article

A MEMS-Based Co-Oscillating Electrochemical Vector Hydrophone

by
Anxiang Zhong
1,2,
Mingwei Chen
1,2,
Yulan Lu
1,2,
Jian Chen
1,2,
Deyong Chen
1,2,* and
Junbo Wang
1,2,*
1
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
2
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
*
Authors to whom correspondence should be addressed.
Micromachines 2022, 13(1), 143; https://doi.org/10.3390/mi13010143
Submission received: 4 January 2022 / Revised: 11 January 2022 / Accepted: 12 January 2022 / Published: 17 January 2022
(This article belongs to the Section C: Chemistry)
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Abstract

Aiming at the development needs of low-frequency and high-sensitivity vector hydrophones, this paper has developed a micro-electro-mechanical system (MEMS) based co-oscillating electrochemical vector hydrophone. We obtained the optimized geometric parameters through simulation analysis of the diameter of the rubber membrane, the length of the flow channel and the diameter of the flow holes. Based on the simulation results, electrodes were fabricated using MEMS technology, and were then assembled and tested. Device characterization was conducted, where the sensitivity and bandwidth were quantified as 0.5–150 Hz, −187 dB ref. 1 V/μPa, respectively. Compared with a previously reported co-oscillating vector hydrophone, the co-oscillating vector hydrophone developed in this article featured a lower working frequency band.
Keywords: co-oscillating vector hydrophone; MEMS; electrochemical vibration sensor co-oscillating vector hydrophone; MEMS; electrochemical vibration sensor

Share and Cite

MDPI and ACS Style

Zhong, A.; Chen, M.; Lu, Y.; Chen, J.; Chen, D.; Wang, J. A MEMS-Based Co-Oscillating Electrochemical Vector Hydrophone. Micromachines 2022, 13, 143. https://doi.org/10.3390/mi13010143

AMA Style

Zhong A, Chen M, Lu Y, Chen J, Chen D, Wang J. A MEMS-Based Co-Oscillating Electrochemical Vector Hydrophone. Micromachines. 2022; 13(1):143. https://doi.org/10.3390/mi13010143

Chicago/Turabian Style

Zhong, Anxiang, Mingwei Chen, Yulan Lu, Jian Chen, Deyong Chen, and Junbo Wang. 2022. "A MEMS-Based Co-Oscillating Electrochemical Vector Hydrophone" Micromachines 13, no. 1: 143. https://doi.org/10.3390/mi13010143

APA Style

Zhong, A., Chen, M., Lu, Y., Chen, J., Chen, D., & Wang, J. (2022). A MEMS-Based Co-Oscillating Electrochemical Vector Hydrophone. Micromachines, 13(1), 143. https://doi.org/10.3390/mi13010143

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