Micromachines, Volume 10, Issue 10 (October 2019) – 88 articles

Tunable-focus liquid lenses provide focal length tuning for optical systems, e.g., cameras, where physical movement of rigid lenses are not an option or not preferable. In this work we present a magnetically actuated liquid lens utilizing the Lorentz force to vary the focal length as the current through the system is varied. The resulting lens can operate as both a diverging and a converging lens depending on the direction of current applied and has a large range of focal lengths, from −305 mm to –111 mm and from 272 mm to 146 mm. We also characterized the aberrations of the lens during the actuation with a Shack–Hartmann wavefront sensor, and utilized the lens for imaging, during which we measured a resolution of 7.13 lp/mm. Full article

Laminar convective heat transfer of elliptical minichannels is investigated for hydrodynamically fully developed but thermal developing flow with no-slip condition. A three-dimensional numerical model is developed in different elliptical geometries with the aspect ratio varying from 0.2 to 1. The effect of Reynolds number (25 ≤ Re ≤ 2000) on the local Nusselt number is examined in detail. The results indicate that the local Nusselt number is a decreasing function of Reynolds number and it is sensitive to Reynolds number especially for Re less than 250. The effect of aspect ratio on local Nusselt number is small when compared with the effect of Reynolds number on local Nusselt number. The local Nusselt number is independent of cross-section geometry at the inlet. The maximum effect of aspect ratio on local Nusselt number arises at the transition section rather than the fully developed region. However, the non-dimensional thermal entrance length is a monotonic decreasing concave function of aspect ratio but a weak function of Reynolds number. Correlations for the local Nusselt number and the thermal developing length for elliptical channels are developed with good accuracy, which may provide guidance for design and optimization of elliptical minichannel heat sinks. Full article

The electroacoustic transducer with the performances of low frequency, small size, and high power is desired in the application of the acoustic telemetry system while drilling. In order to fulfill the severe requirements, a novel cascade-connected transducer with multi-segment is developed. The essential framework of such a transducer is to add the cross-beams in the multi-segment cascade-connected arrangement, based on the fundamental configuration of the longitudinal transducer. The flexural vibrations of cross-beams help the transducer to present the appropriate coupling between longitudinal and flexural vibrations, which provide many benefits in keeping the advantages of the longitudinal transducer and lowering the resonance frequency. It is the finite element method to be used for simulating the mode shapes of the cascade-connected transducer, especially the behavior of the cross-beams, and some performances of transducer are also predicted. Several prototypes of cascade-connected transducers with different segments are manufactured. Their related tests show a good agreement with the finite element simulations and analyses. Their characteristics of low frequency, small size, light weight, and high power are attractive for the transmitting or receiving application in the acoustic telemetry system while drilling. Full article

The three-dimensional geometry of a micromixer with an asymmetrical split-and-recombine mechanism was optimized to enhance the fluid-mixing capability at a Reynolds number of 20. Single and multi-objective optimizations were carried out by using particle swarm optimization and a genetic algorithm on a modeled surrogate surface. Surrogate modeling was performed using the computational results for the mixing. Mixing and flow analyses were carried out by solving the convection–diffusion equation in combination with the three-dimensional continuity and momentum equations. The optimization was carried out with two design variables related to dimensionless geometric parameters. The mixing effectiveness was chosen as the objective function for the single-objective optimization, and the pressure drop and mixing index at the outlet were chosen for the multi-objective optimization. The sampling points in the design space were determined using a design of experiment technique called Latin hypercube sampling. The surrogates for the objective functions were developed using a Kriging model. The single-objective optimization resulted in 58.9% enhancement of the mixing effectiveness compared to the reference design. The multi-objective optimization provided Pareto-optimal solutions that showed a maximum increase of 48.5% in the mixing index and a maximum decrease of 55.0% in the pressure drop in comparison to the reference design. Full article

We report a novel three-axial magnetic-piezoelectric microelectromechanical systems (MEMS) magnetic field sensor. The sensor mainly consists of two sensing elements. Each of the sensing elements consists of a magnetic Ni thick film, a Pt/Ti top electrode, a piezoelectric lead zirconate titanate (PZT) thin film, a Pt/Ti bottom electrode, a SiO₂ insulation layer, and a moveable Si MEMS diaphragm. When the sensor is subjected to an AC magnetic field oscillating at 7.5 kHz, a magnetic force interaction between the magnetic field and Ni thick film is produced. Subsequently, the force deforms and deflects the diaphragms as well as the PZT thin film deposited on the diaphragms. The deformation and deflection produce corresponding voltage outputs due to the piezoelectric effect. By analyzing the voltage outputs through our criterion, we can obtain details of the unknown magnetic fields to which the sensor is subjected. This achieves sensing of three-axial magnetic fields. The experimental results show that the sensor is able to sense three-axial magnetic fields ranging from 1 to 20 Oe, with X-axial, Y-axial, and Z-axial sensitivities of 0.156 mV_rms/Oe, 0.156 mV_rms/Oe, and 0.035 mV_rms/Oe, respectively, for sensing element A and 0.033 mV_rms/Oe, 0.044 mV_rms/Oe, and 0.130 mV_rms/Oe, respectively, for sensing element B. Full article

We present a 512-microchannel geometrical passive breakup device for the mass production of microdroplets. The mass production is achieved through the passive breakup of a droplet into two droplets. The microchannel geometry in the microfluidic device was designed and optimized by focusing on stable droplet splitting for microdroplet preparation and minimizing the hydraulic resistance of the microchannel for achieving high throughput; the minimization of hydraulic resistance was achieved by employing analytical approaches. A total of 512 microdroplets could be prepared from a single liquid plug by making the liquid plug pass through nine sequential T-junctions in the microfluidic device, which led to the splitting of droplets. The microfluidic device was fabricated using conventional photolithography and polydimethylsiloxane (PDMS) casting. We estimated the performance of the microfluidic device in terms of the size distribution and production rate of microdroplets. Microdroplets with a diameter of 40.0 ± 2.2 µm were prepared with a narrow size distribution (coefficient of variation (CV) < 5.5%) for flow rates of disperse (Q_d) and continuous phase (Q_c) of 2 and 3 mL/h, respectively. Microdroplet production rates were measured using a high-speed camera. Furthermore, monodisperse microdroplets were prepared at 42.7 kHz for Q_d and Q_c of 7 and 15 mL/h, respectively. Finally, the feasibility of the fabricated microfluidic device was verified by using it to prepare biodegradable chitosan microspheres. Full article

A new design for a single-use disposable pneumatic microgripper is presented in this paper. It enables very cost-effective batch microfabrication in SU-8 with a single lithography mask by shifting manufacturing complexity into reusable components. An optically readable force sensor with potential to be used in a feedback loop has been integrated in order to enable gripping with a controlled force. The sensors are first examined separately from the gripper and exhibit good linearity. The gripper function utilizes the disposable gripper element together with a reusable gripper fixture. During experiments, the pneumatically actuated microgripper can vary the gripping force within a range of a few mN (up to 5.7 mN was observed). This microgripper is planned to be used in a liquid environment for gripping larger aggregates of cells in combination with the patch clamp technique. This approach will allow Langerhans islets suspended in an electrolyte solution to be grasped and held during electrophysiological measurements without cell damage. Full article

Imprinting pressure is the significant factor for composite mould durability and pattern quality during UV nanoimprinting on complex surfaces. To solve these problems, the effects of imprinting pressure on the damage of flexible composite mould and pattern quality-encountering particles were investigated through experiment and simulation. It was found that increasing the pressure could improve the pattern quality, but it will damage the mould and reduce the durability. Moreover, too small pressure could lead to serious pattern defects. Therefore, the imprint pressure of 30 kPa was suitable for use in the imprinting process from the viewpoints of protecting the mould and reducing pattern defects. These findings will be useful for improving the pattern quality and mould durability. Full article

Micropatterning is often used to engineer the surface properties of objects because it allows the enhancement or modification of specific functionalities without modification of the bulk material properties. Microneedle arrays have been explored in the past for drug delivery and enhancement of tissue anchoring; however, conventional methods are primarily limited to thick, planar substrates. Here, we demonstrate a method for the fabrication of microneedle arrays on thin flexible polyurethane substrates. These thin-film microneedle arrays can be used to fabricate balloons and other inflatable objects. In addition, these thin-filmed microneedles can be transferred, using thermal forming processes, to more complex 3D objects on which it would otherwise be difficult to directly pattern microneedles. This function is especially useful for medical devices, which require effective tissue anchorage but are a challenging target for micropatterning due to their 3D nonplanar shape, large size, and the complexity of the required micropatterns. Ultrathin flexible thermoplastic polyurethane microneedle arrays were fabricated from a polydimethylsiloxane (PDMS) mold. The technique was applied onto the nonplanar surface of rapidly prototyped soft robotic implantable polyurethane devices. We found that a microneedle-patterned surface can increase the anchorage of the device to a tissue by more than twofold. In summary, our soft lithographic patterning method can rapidly and inexpensively generate thin-film microneedle surfaces that can be used to produce balloons or enhance the properties of other 3D objects and devices. Full article

To realize the electrochemical etching of a micro spiral cylindrical electrode, a new method of rotating electrochemical etching is proposed, and its process is further studied. First, according to the electrochemical etching principle, the machining mechanism of rotating electrochemical etching of a micro spiral cylindrical electrode is introduced. Second, based on the spiral vortex theory in the Taylor-Couette system, the effect of the high-speed rotating cylindrical microelectrode on its external flow field is analyzed. Third, the effects of rotation direction, rotation speed, machining voltage, and machining time on the thread structure are analyzed by experiments. Finally, a spiral cylindrical microelectrode with good surface thread shape is fabricated within two minutes by using the optimized machining parameters. It is proved that the rotating electrochemical etching method is an easy way to fabricate a micro spiral cylindrical electrode with high efficiency and low cost. Full article

An anthracene aromatic unit was introduced into the phenylethynyl structure by a rigid acetylene linkage at the C-9 and C-10 positions via Sonogashira coupling reactions, resulting in a planar and straight-backbone molecule (9,10-bis((4-((3,7-dimethyloctyl)oxy) phenyl) ethynyl) anthracene) (BPEA). Thermogravimetric analysis demonstrated the good thermal stability of the BPEA. Photoluminescence analysis showed that a suitable expanded π-conjugation in the BPEA made its excitation band extend into the visible region, and an intense green emission was observed under blue-light excitation. A bright green light-emitting diode with an efficiency of 18.22 lm/w was fabricated by coating the organic phosphor onto a 460 nm-emitting InGaN chip. All the results indicate that BPEA is a useful green-emitting material which is efficiently excited by blue light, and therefore, that it could be applied in many fields without UV radiation. Full article

This paper addresses the issue of mold release quality in an electrochemical replication of an optical polyvinyl chloride (PVC) mold, which has microlens array or microprisms array on its surface. The main idea is to deposit a nanoscale Cr thin layer as an antisticking layer on the PVC mold surface, followed by Ag film deposition as the conductive layer using magnetron sputtering, and finally, a nickel layer is electrochemically deposited on the Ag surface. By doing so, the upripping of the nickel mold from the PVC mold becomes easier, resulting in better mold release quality. The experiment results showed that when the Cr antisticking layer was used, the release strength between the nickel mold and the PVC substrate reduced from 1.94 N/cm to 1.43 N/cm, the surface roughness of the PVC substrate after mold release reduced from 0.60 μm to 0.55 μm, the surface roughness of the nickel mold reduced from 0.63 μm to 0.49 μm, the retroreflection coefficient of the nickel mold increased from 1600 cd·lx⁻¹·m⁻² to 2100 cd·lx⁻¹·m⁻², and the surface energy of the PVC substrate reduced from 31.47 mN/m to 15.53 mN/m. Full article

Energy harvesting from human-body-induced motion is mostly challenging due to the low-frequency, high-amplitude nature of the motion, which makes the use of conventional cantilevered spring-mass oscillators unrealizable. Frequency up-conversion by mechanical impact is an effective way to overcome the challenge. However, direct impact on the transducer element (especially, piezoelectric) increases the risk of damaging it and raises questions on the reliability of the energy harvester. In order to overcome this shortcoming, we proposed a transverse mechanical impact driven frequency up-converted hybrid energy harvester for human-limb motion. It utilizes the integration of both piezoelectric and electromagnetic transducers in a given size that allows more energy to be harvested from a single mechanical motion, which, in turn, further improves the power density. While excited by human-limb motion, a freely-movable non-magnetic sphere exerts transverse impact by periodically sliding over a seismic mass attached to a double-clamped piezoelectric bimorph beam. This allows the beam to vibrate at its resonant frequency and generates power by means of the piezoelectric effect. A magnet attached to the beam also takes part in generating power by inducing voltage in a coil adjacent to it. A mathematical model has been developed and experimentally corroborated. At a periodic limb-motion of 5.2 Hz, maximum 93 µW and 61 µW average powers (overall 8 µW·cm⁻³ average power density) were generated by the piezoelectric and the electromagnetic transducers, respectively. Moreover, the prototype successfully demonstrated the application of low-power electronics via suitable AC-DC converters. Full article

Recent advances in integrating microengineering and tissue engineering have enabled the creation of promising microengineered physiological models, known as organ-on-a-chip (OOC), for experimental medicine and pharmaceutical research. OOCs have been used to recapitulate the physiologically critical features of specific human tissues and organs and their interactions. Application of chemical and mechanical stimuli is critical for tissue development and behavior, and they were also applied to OOC systems. Mechanical stimuli applied to tissues and organs are quite complex in vivo, which have not adequately recapitulated in OOCs. Due to the recent advancement of microengineering, more complicated and physiologically relevant mechanical stimuli are being introduced to OOC systems, and this is the right time to assess the published literature on this topic, especially focusing on the technical details of device design and equipment used. We first discuss the different types of mechanical stimuli applied to OOC systems: shear flow, compression, and stretch/strain. This is followed by the examples of mechanical stimuli-incorporated OOC systems. Finally, we discuss the potential OOC systems where various types of mechanical stimuli can be applied to a single OOC device, as a better, physiologically relevant recapitulation model, towards studying and evaluating experimental medicine, human disease modeling, drug development, and toxicology. Full article

A variety of potential applications such as visible light communications require laser sources with a narrow linewidth and a single wavelength emission in the blue light region. The gallium nitride (GaN)-based distributed feedback laser diode (DFB-LD) is a promising light source that meets these requirements. Here, we present GaN DFB-LDs that share growth and fabrication processes and have surface gratings and sidewall gratings on the same epitaxial substrate, which makes LDs with different structures comparable. By electrical pulse pumping, single-peak emissions at 398.5 and 399.95 nm with a full width at half maximum (FWHM) of 0.32 and 0.23 nm were achieved, respectively. The surface and sidewall gratings were fabricated alongside the p-contact metal stripe by electrical beam lithography and inductively coupled plasma etching. DFB LDs with 2.5 μm ridge width exhibit a smaller FWHM than those with 5 and 10 μm ridge widths, indicating that the narrow ridge width is favorable for the narrowing of the line width of the DFB LD. The slope efficiency of the DFB LD with sidewall gratings is higher than that of surface grating DFB LDs with the same ridge width and period of gratings. Our experiment may provide a reliable and simple approach for optimizing gratings and GaN DFB-LDs. Full article

Circulating tumor cells (CTCs) are important clinical markers for both cancer early diagnosis and prognosis. Various techniques have been developed in the past decade to isolate and quantify these cells from the blood while microfluidic technology attracts significant attention due to better controlled microenvironment. When combined with advanced nanotechnologies, CTC isolation performance in microfluidic devices can be further improved. In this article, by extending the wavy-herringbone concept developed earlier in our team, we prepared a hierarchical microfluidic chip by introducing a uniform coating of nanoparticles with anti-epithelial cell adhesion molecule (EpCAM) on wavy microgrooves. This hierarchical structured platform not only maintains the capture purity of the wavy-herringbone structure but improves the capture efficiency thanks to the larger surface area to volume ratio brought by nanoparticles. Our results demonstrated a capture efficiency of almost 100% at a low shear rate of 60/s. Even at a higher shear rate of 400/s, the hierarchical micro/nanostructures demonstrated an enhancement of up to ~3-fold for capture efficiency (i.e., 70%) and ~1.5-fold for capture purity (i.e., 68%), compared to wavy-herringbone structures without nanoparticle coating. With these promising results, this hierarchical structured platform represents a technological advancement for CTC isolation and cancer care. Full article

Point-of-care ultrasound systems are widely used in ambulances and emergency rooms. However, the excessive heat generated from ultrasound transmitters has an impact on the implementation of piezoelectric transducer elements and on battery consumption, thereby affecting the system’s sensitivity and resolution. Non-linear power amplifiers, such as class-C amplifiers, could substitute linear power amplifiers, such as class-A amplifiers, which are currently used in point-of-care ultrasound systems. However, class-C power amplifiers generate less output power, resulting in a reduction of system sensitivity. To overcome this issue, we propose a new diode expander architecture dedicated to power amplifiers to reduce the effects of sinusoidal pulses toward the power supply. Thus, the proposed architecture could increase the input pulse amplitudes applied to the main transistors in the power amplifiers, hence increasing the output voltage of such amplifiers. To verify the proposed concept, pulse-echo responses from an ultrasonic transducer were tested with the developed class-C power amplifier using a resistor divider and the designed diode expander architecture. The peak-to-peak amplitude of the echo signals of the ultrasonic transducers when using a class-C power amplifier with a diode expander architecture (2.98 V_p–p) was higher than that for the class-C power amplifier with a resistor divider architecture (2.51 V_p–p). Therefore, the proposed class-C power amplifier with diode expander architecture is a potential candidate for improving the sensitivity performance of piezoelectric transducers for point-of-care ultrasound systems. Full article

This study conducts large-scale molecular dynamics (MD) simulations of micro cutting of single crystal 6H silicon carbide (SiC) with up to 19 million atoms to investigate the mechanism of unstable material removal modes within the transitional range of undeformed chip thickness in which either brittle or ductile mode of cutting might occur. Under this transitional range, cracks are always formed in the cutting zone, but the stress states cannot guarantee their propagation. The cutting mode is brittle when the cracks can propagate and otherwise ductile mode cutting happens. Plunge cutting experiment is conducted to produce a taper groove on a 6H SiC wafer. There is a transitional zone between the brittle-cut and ductile-cut regions, which has a mostly smooth surface with a few brittle craters on it. This study contributes to the understanding of the detailed process of brittle-ductile cutting mode transition (BDCMT) as it shows that a transitional range can occur even for single crystals without internal defects and provides guidance for the determination of t_critical from taper grooves made by various techniques, e.g., to adopt larger t_critical around the end of the transitional range to increase machining efficiency for grinding or turning as long as the cracks do not extend below the machined surface. Full article

Frequency trimming based on mass and stiffness modification is an important post-fabrication process for micro-shell resonators (MSRs). However, the trimming effects on the quality factor are seldom studied, although they may have great influence on the performance of the resonator. This paper presents a study on the quality factor (Q-factor) variation of trimmed micro-shell resonators (MSR). Thermoelastic damping (Q_TED) and anchor loss (Q_anchor) are found to be the dominant energy loss mechanisms resulting in the reduction of the overall Q-factor, according to finite element method (FEM). The effects of different trimming methods on Q_TED and Q_anchor are studied here, respectively. It is found that trimming grooves ablated in the rim of the resonator can cause a ~1–10% reduction of Q_TED, and the length of trimming groove is positively related to the reduction of Q_TED. The reduction of Q_TED caused by the mass adding process is mainly related to the thermal expansion coefficient and density of the additive and contact area between the resonator and additive masses. Besides, the first and second harmonic errors caused by asymmetrical trimming can cause a 10–90% reduction of Q_anchor. Finally, trimming experiments were conducted on different resonators and the results were compared with FEM simulation. The work presented in this paper could help to optimize the trimming process of MSRs. Full article

The vertical-cavity surface-emitting laser (VCSEL) has unique advantages over the conventional edge-emitting laser and has recently attracted a lot of attention. However, the output power of GaN-based VCSEL is still low due to the large electron leakage caused by the built-in polarization at the heterointerface within the device. In this paper, in order to improve the output power, a new structure of p-type composition-graded Al_xGa_1−xN electron blocking layer (EBL) is proposed in the VCSEL, by replacing the last quantum barrier (LQB) and EBL in the conventional structure. The simulation results show that the proposed EBL in the VCSEL suppresses the leaking electrons remarkably and contributes to a 70.6% increase of the output power, compared with the conventional GaN-based VCSEL. Full article

Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting issues in electrothermal bimorph actuators whose causes are not well understood. In this paper, the stability of an $\mathrm{Al}/{\mathrm{SiO}}_2$ bimorph electrothermal MEMS mirror operated in both static and dynamic scan mode has been studied. Particularly, the angular drifts of the MEMS mirror plate were measured over 90 h at different temperatures in the range of $50$ – $150$ °C. The experiments show that the temporal drift of the mirror plate orientation largely depends on the temperature of the electrothermal bimorph actuators. Interestingly, it is found that the angular drift changes from falling to rising as the temperature increases. An optimal operating temperature between $75$ °C to $100$ °C for the MEMS mirror is identified. At this temperature, the MEMS mirror exhibited stable scanning with an angular drift of less than $0.0001$ °/h. Full article

Ever since the development of digital devices, the recognition of human gestures has played an important role in many Human-Computer interface applications. Various wearable devices have been developed, and inertial sensors, magnetic sensors, gyro sensors, electromyography, force-sensitive resistors, and other types of sensors have been used to identify gestures. However, there are different drawbacks for each sensor, which affect the detection of gestures. In this paper, we present a new gesture recognition method using a Flexible Epidermal Tactile Sensor based on strain gauges to sense deformation. Such deformations are transduced to electric signals. By measuring the electric signals, the sensor can estimate the degree of deformation, including compression, tension, and twist, caused by movements of the wrist. The proposed sensor array was demonstrated to be capable of analyzing the eight motions of the wrist, and showed robustness, stability, and repeatability throughout a range of experiments aimed at testing the sensor array. We compared the performance of the prototype device with those of previous studies, under the same experimental conditions. The result shows our recognition method significantly outperformed existing methods. Full article

Infections with antimicrobial-resistant (AMR) bacteria are globally on the rise. In the future, multi-resistant infections will become one of the major problems in global health care. In order to enable reserve antibiotics to retain their effect as long as possible, broad-spectrum antibiotics must be used sparingly. This can be achieved by a rapid microfluidic phenotypic antibiotic susceptibility test, which provides the information needed for a targeted antibiotic therapy in less time than conventional tests. Such microfluidic tests must cope with a low bacteria concentration. On-chip filtering of the samples to accumulate bacteria can shorten the test time. By means of fluorescence microscopy, we examined a novel nanogap filtration principle to hold back Escherichia coli and to perform cultivation experiments with and without antibiotics present. Microfluidic chips based on the nanogap flow principle showed to be useful for the concentration and cultivation of E. coli. With a concentration of 10⁶ cells/mL, a specific growth rate of 0.013 min⁻¹ and a doubling time of 53 min were achieved. In the presence of an antibiotic, no growth was observed. The results prove that this principle can, in future, be used in fast and marker-free antimicrobial susceptibility testing (AST). Full article

In this paper, we present the fabrication and Direct Current/high voltage characterizations of AlN-based thin and thick channel AlGaN/GaN heterostructures that are regrown by molecular beam epitaxy on AlN/sapphire. A very high lateral breakdown voltage above 10 kV was observed on the thin channel structure for large contact distances. Also, the buffer assessment revealed a remarkable breakdown field of 5 MV/cm for short contact distances, which is far beyond the theoretical limit of the GaN-based material system. The potential interest of the thin channel configuration in AlN-based high electron mobility transistors is confirmed by the much lower breakdown field that is obtained on the thick channel structure. Furthermore, fabricated transistors are fully functional on both structures with low leakage current, low on-resistance, and reduced temperature dependence as measured up to 300 °C. This is attributed to the ultra-wide bandgap AlN buffer, which is extremely promising for high power, high temperature future applications. Full article

Low resistivity polycrystalline Si could be selectively grown in the deep (~200 nm) and narrow patterns (~20 nm) of 20 nm pitch design rule DRAM (Dynamic Random Access Memory) by microwave plasma-enhanced chemical vapor deposition (MW-CVD). We were able to achieve the high phosphorus (CVD gap-fill in a large electrical contact area which does is affected by line pitch size) doping concentration (>2.5 × 10²¹ cm⁻³) and, thus, a low resistivity by adjusting source gas (SiH₄, H₂, PH₃) decomposition through MW-CVD with a showerhead controlling the decomposition of source gases by using two different gas injection paths. In this study, a selective growth mechanism was applied by using the deposition/etch cyclic process to achieve the bottom–up process in the L-shaped contact, using H₂ plasma that simultaneously promoted the deposition and the etch processes. Additionally, the cyclic selective growth technique was set up by controlling the SiH₄ flow rate. The bottom-up process resulted in a uniform doping distribution, as well as an excellent filling capacity without seam and center void formation. Thus, low contact resistivity and higher transistor on-current could be achieved at a high and uniform phosphorus (P)-concentration. Compared to the conventional thermal, this method is expected to be a strong candidate for the complicated deep and narrow contact process. Full article

A cancer spheroid array chip was developed by modifying a micropillar and microwell structure to improve the evaluation of drugs targeting specific mutations such as phosphor-epidermal growth factor receptor (p-EGFR). The chip encapsulated cells in alginate and allowed cancer cells to grow for over seven days to form cancer spheroids. However, reagents or media used to screen drugs in a high-density spheroid array had to be replaced very carefully, and this was a tedious task. Particularly, the immunostaining of cancer spheroids required numerous steps to replace many of the reagents used for drug evaluation. To solve this problem, we adapted a micropillar and microwell structure to a spheroid array. Thus, culturing cancer spheroids in alginate spots attached to the micropillar allowed us to replace the reagents in the microwell chip with a single fill of fresh medium, without damaging the cancer spheroids. In this study, a cancer spheroid array was made from a p-EGFR-overexpressing cell line (A549 lung cancer cell line). In a 12 by 36 column array chip (25 mm by 75 mm), the spheroid over 100 µm in diameter started to form at day seven and p-EGFR was also considerably overexpressed. The array was used for p-EGFR inhibition and cell viability measurement against seventy drugs, including ten EGFR-targeting drugs. By comparing drug response in the spheroid array (spheroid model) with that in the single-cell model, we demonstrated that the two models showed different responses and that the spheroid model might be more resistant to some drugs, thus narrowing the choice of drug candidates. Full article

This study presents a misalignment light-guiding module to increase the effectiveness of absorbing light. For a general fixed-type photovoltaic (PV) panel, the misalignment light decreases the efficiency of the system. A solar tracking system was installed for obtaining higher power generation. However, the cost of the PV system and maintenance was 5–10 times higher than the general type. In this study, this module is composed of an array of misalignment light-guiding units that consist of a non-axisymmetric compound parabolic curve (NACPC) and a freeform surface collimator. The NACPC efficiently collects the misalignment light within ±30° and guides the light to the collimator. The light has a better uniformity and smaller angle at the exit aperture. The simulation results show that the optical efficiency of the unit was above 70% when the misalignment angle was smaller than 20°. The experimental results show that the power generation of the light-guiding unit was 1.8 times higher than the naked PV panel. Full article

Micro-electromechanical system (MEMS) suspended inductors have been widely studied in recent decades because of their excellent radio frequency performance. However, the deformation of the inductor coil and the performance variation usually occur to the MEMS suspended inductors when the inductors are under mechanical shock. Few studies have been carried out on the performance variation of MEMS suspended inductors under shock. In this study, the mechanism of the performance variation of MEMS suspended inductors under mechanical shock is analyzed by combining theoretical analysis and experiments. A theoretical analysis based on the lumped-element equivalent model is presented and shock tests are carried out. The shock tests show that the main reason of the MEMS suspended inductor performance variation after mechanical shock is the variation of the substrate parasitic effect, which is caused by the variation of the suspension height of the inductor after shock. The test results agree with the theoretical analysis. Full article

A self-activated micropump which is capable of stable velocity transport for a liquid to flow a given distance inside a 3D microchannel has been a dream of microfluidic scientists for a long time. A new self-activated pumping mechanism has been proposed in this paper. It is different from the authors’ previous research which relied on the fluid resistance of a quartz capillary tube or end-blocked gas-permeable silicone or a polydimethylsiloxane (PDMS) wall to automate the flow. In this research, an end-open stretched Teflon tube was utilized for passive transport for the first time. A new fluid transmission mode was adopted with the assistance of a cheaper easily accessible oil mixture to achieve stable continuous flow. Finally, this novel micropump has been applied to real-time continuous-flow polymerase chain reactions (PCRs), with an amplification efficiency similar to that of a commercial PCR cycler instrument. Full article