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Effects of Imprinting Pressure on the Damage of Flexible Composite Mould and Pattern Quality during UV Nanoimprinting

Institute of NanoEngineering, College of Civil Engineering and Architecture, Shandong University of Science and Technology, Qingdao 266590, China
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Micromachines 2019, 10(10), 706; https://doi.org/10.3390/mi10100706
Received: 6 September 2019 / Revised: 10 October 2019 / Accepted: 15 October 2019 / Published: 17 October 2019
(This article belongs to the Special Issue Fabrication and application of micro/nano-textured surfaces)
Imprinting pressure is the significant factor for composite mould durability and pattern quality during UV nanoimprinting on complex surfaces. To solve these problems, the effects of imprinting pressure on the damage of flexible composite mould and pattern quality-encountering particles were investigated through experiment and simulation. It was found that increasing the pressure could improve the pattern quality, but it will damage the mould and reduce the durability. Moreover, too small pressure could lead to serious pattern defects. Therefore, the imprint pressure of 30 kPa was suitable for use in the imprinting process from the viewpoints of protecting the mould and reducing pattern defects. These findings will be useful for improving the pattern quality and mould durability. View Full-Text
Keywords: composite mould; pattern quality; imprinting pressure; UV nanoimprint composite mould; pattern quality; imprinting pressure; UV nanoimprint
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Zheng, X.; Wang, Q.; Du, W. Effects of Imprinting Pressure on the Damage of Flexible Composite Mould and Pattern Quality during UV Nanoimprinting. Micromachines 2019, 10, 706.

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