Effects of Imprinting Pressure on the Damage of Flexible Composite Mould and Pattern Quality during UV Nanoimprinting
Abstract
:1. Introduction
2. Methods and Modeling
2.1. Experiment
2.2. Numerical Simulation
3. Results and Discussions
3.1. Morphology of the Fabricated Grating Pattern
3.2. Von Mises Stress Distribution and Defects
3.3. Effects of Imprinting Pressure on Composite Mould
3.4. Effects of Imprinting Pressure on Pattern Quality
4. Conclusions
Author Contributions
Funding
Conflicts of Interest
References
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Zheng, X.; Wang, Q.; Du, W. Effects of Imprinting Pressure on the Damage of Flexible Composite Mould and Pattern Quality during UV Nanoimprinting. Micromachines 2019, 10, 706. https://doi.org/10.3390/mi10100706
Zheng X, Wang Q, Du W. Effects of Imprinting Pressure on the Damage of Flexible Composite Mould and Pattern Quality during UV Nanoimprinting. Micromachines. 2019; 10(10):706. https://doi.org/10.3390/mi10100706
Chicago/Turabian StyleZheng, Xu, Qing Wang, and Wenquan Du. 2019. "Effects of Imprinting Pressure on the Damage of Flexible Composite Mould and Pattern Quality during UV Nanoimprinting" Micromachines 10, no. 10: 706. https://doi.org/10.3390/mi10100706